JPS6189410U - - Google Patents
Info
- Publication number
- JPS6189410U JPS6189410U JP17551784U JP17551784U JPS6189410U JP S6189410 U JPS6189410 U JP S6189410U JP 17551784 U JP17551784 U JP 17551784U JP 17551784 U JP17551784 U JP 17551784U JP S6189410 U JPS6189410 U JP S6189410U
- Authority
- JP
- Japan
- Prior art keywords
- face plate
- sheet
- suction
- attached
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17551784U JPS6189410U (es) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17551784U JPS6189410U (es) | 1984-11-19 | 1984-11-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6189410U true JPS6189410U (es) | 1986-06-11 |
Family
ID=30733118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17551784U Pending JPS6189410U (es) | 1984-11-19 | 1984-11-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6189410U (es) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH068088A (ja) * | 1992-06-30 | 1994-01-18 | Shin Etsu Handotai Co Ltd | ウエーハ研磨用固定板 |
JP2020015133A (ja) * | 2018-07-25 | 2020-01-30 | 株式会社タカハシキカイ | 真空チャック |
-
1984
- 1984-11-19 JP JP17551784U patent/JPS6189410U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH068088A (ja) * | 1992-06-30 | 1994-01-18 | Shin Etsu Handotai Co Ltd | ウエーハ研磨用固定板 |
JP2020015133A (ja) * | 2018-07-25 | 2020-01-30 | 株式会社タカハシキカイ | 真空チャック |