JPS6189137U - - Google Patents
Info
- Publication number
- JPS6189137U JPS6189137U JP1984174074U JP17407484U JPS6189137U JP S6189137 U JPS6189137 U JP S6189137U JP 1984174074 U JP1984174074 U JP 1984174074U JP 17407484 U JP17407484 U JP 17407484U JP S6189137 U JPS6189137 U JP S6189137U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- metal
- semiconductor pressure
- silicon
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174074U JPS6189137U (enExample) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174074U JPS6189137U (enExample) | 1984-11-16 | 1984-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6189137U true JPS6189137U (enExample) | 1986-06-10 |
Family
ID=30731704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984174074U Pending JPS6189137U (enExample) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6189137U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57186373A (en) * | 1981-05-12 | 1982-11-16 | Fuji Electric Corp Res & Dev Ltd | Semiconductor pressure sensor |
| JPS57197873A (en) * | 1981-05-29 | 1982-12-04 | Hitachi Ltd | Semiconductor pressure detector |
| JPS58221135A (ja) * | 1982-06-18 | 1983-12-22 | Hitachi Ltd | シリコンダイアフラム形圧力センサ |
-
1984
- 1984-11-16 JP JP1984174074U patent/JPS6189137U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57186373A (en) * | 1981-05-12 | 1982-11-16 | Fuji Electric Corp Res & Dev Ltd | Semiconductor pressure sensor |
| JPS57197873A (en) * | 1981-05-29 | 1982-12-04 | Hitachi Ltd | Semiconductor pressure detector |
| JPS58221135A (ja) * | 1982-06-18 | 1983-12-22 | Hitachi Ltd | シリコンダイアフラム形圧力センサ |