JPS618905B2 - - Google Patents
Info
- Publication number
- JPS618905B2 JPS618905B2 JP14301979A JP14301979A JPS618905B2 JP S618905 B2 JPS618905 B2 JP S618905B2 JP 14301979 A JP14301979 A JP 14301979A JP 14301979 A JP14301979 A JP 14301979A JP S618905 B2 JPS618905 B2 JP S618905B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14301979A JPS5666634A (en) | 1979-11-05 | 1979-11-05 | Cooling and heating method utilizing cyclic heat-accumulation type heat pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14301979A JPS5666634A (en) | 1979-11-05 | 1979-11-05 | Cooling and heating method utilizing cyclic heat-accumulation type heat pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5666634A JPS5666634A (en) | 1981-06-05 |
| JPS618905B2 true JPS618905B2 (OSRAM) | 1986-03-18 |
Family
ID=15329031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14301979A Granted JPS5666634A (en) | 1979-11-05 | 1979-11-05 | Cooling and heating method utilizing cyclic heat-accumulation type heat pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5666634A (OSRAM) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144567A (ja) * | 1984-01-06 | 1985-07-30 | サンデン株式会社 | 水熱源ヒ−トポンプ |
| EP0166549A2 (en) * | 1984-06-21 | 1986-01-02 | Varian Associates, Inc. | Method for proximity effect correction in electron beam lithography systems |
| JPS61116253A (ja) * | 1984-11-13 | 1986-06-03 | 株式会社 前川製作所 | ヒートポンプ装置 |
| JPH0715876B2 (ja) * | 1985-07-03 | 1995-02-22 | 株式会社ニコン | 露光方法及びフォトリソグラフィ装置 |
| JPS6152176U (OSRAM) * | 1985-08-27 | 1986-04-08 | ||
| JPS61138971U (OSRAM) * | 1985-09-25 | 1986-08-28 | ||
| CN106352603B (zh) * | 2016-08-30 | 2020-04-10 | 南京酷朗电子有限公司 | 地源换热器分区分级管理系统 |
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1979
- 1979-11-05 JP JP14301979A patent/JPS5666634A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5666634A (en) | 1981-06-05 |