JPS6188992A - Detector for optical path deviation of laser beam - Google Patents

Detector for optical path deviation of laser beam

Info

Publication number
JPS6188992A
JPS6188992A JP59210354A JP21035484A JPS6188992A JP S6188992 A JPS6188992 A JP S6188992A JP 59210354 A JP59210354 A JP 59210354A JP 21035484 A JP21035484 A JP 21035484A JP S6188992 A JPS6188992 A JP S6188992A
Authority
JP
Japan
Prior art keywords
laser beam
optical path
path deviation
wire
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59210354A
Other languages
Japanese (ja)
Inventor
Tsutomu Usami
宇佐美 勉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59210354A priority Critical patent/JPS6188992A/en
Publication of JPS6188992A publication Critical patent/JPS6188992A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam

Abstract

PURPOSE:To decrease the danger when the optical path deviation of a laser beam arises by extending a fine metallic wire in a beam duct and detecting the melt-cutting of the fine metallic wire owing to the optical path deviation of the laser beam. CONSTITUTION:The laser beam 2 which is normal in the optical path passes approximately the central part of a piece of the fine metallic wire extended to cross each other in a square shape in the beam duct 6 through holes 7. However, if the optical path of the beam 2 deviates, the laser beam strikes against the wire 8 and melts-cuts instantaneously the wire 8. The stop of the conduction of electricity to the wire 8 or the change in the tension thereof owing to the melt cutting is detected by an operation board 5 and the laser oscillation is stopped. The response time to stop the laser oscillation by detecting instantaneously the optical path deviation of the laser beam 2 is considerably reduced by the above-mentioned constitution.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、レーザ加工装置におけるレーザビームの光路
ずれ検出装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for detecting optical path deviation of a laser beam in a laser processing device.

〔従来の技術〕[Conventional technology]

レーザビーム伝送用のレーザビームダクトを有するレー
ザ加工機において、レーザビームが光路をずれた場合、
ビームダクトに当って溶解させ穴を開けて飛び出すこと
があり、危険である。そのため、従来第2図、第3図に
示すような光路ずれ検出装置が設けられている。
In a laser processing machine that has a laser beam duct for laser beam transmission, if the laser beam deviates from the optical path,
It is dangerous because it may hit the beam duct and melt, creating a hole and flying out. For this reason, an optical path deviation detection device as shown in FIGS. 2 and 3 has been conventionally provided.

第2図は従来の光路ずれ検出装置を示す断面図、第6図
は第2図のA −A’線に沿った断面図である。
FIG. 2 is a sectional view showing a conventional optical path deviation detection device, and FIG. 6 is a sectional view taken along line A-A' in FIG.

図において、(すはレーザビームをカバーするビームダ
ク) 、(21はレーザビーム、(3)は光路ずれを検
出する検出用プレート、(4)は検出用プレート(3)
の温度変化によって鋤くサーモスタッ) 、(5)はサ
ーモスタット(4)で検知した信号を受ける操作盤であ
る0 従来の光路ずれ検出装置は上記のように構成されており
、レーザ発振器(図示せず)より出力されたレーザビー
ム(2)がビームダクト(1)内で光路をずれると、最
初にビームダクト(1)内に突出させた検出用プレート
(3)に当る。これにより検出用プレー ) +31の
温度が上昇するので、これを、サーモスタット(4)で
検知し、操作盤(5)に信号を出力する。
In the figure, (21 is the beam duct that covers the laser beam), (21 is the laser beam, (3) is the detection plate that detects optical path deviation, and (4) is the detection plate (3).
(5) is an operation panel that receives the signal detected by the thermostat (4). Conventional optical path deviation detection devices are configured as described above, and include a laser oscillator (not shown). ) When the laser beam (2) output from the laser beam (2) deviates from its optical path within the beam duct (1), it first hits the detection plate (3) protruding into the beam duct (1). As a result, the temperature of the detection plate +31 increases, which is detected by the thermostat (4) and outputs a signal to the operation panel (5).

操作盤(5)はその出力信号によりレーザ発振を停止さ
せる。
The operation panel (5) stops laser oscillation by its output signal.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の光路ずれ検出装置は、上記のように光路のずれた
レーザビーム(2)が検出プレート(3)に当って、温
度が上昇し、検出プレート(3)内の熱伝導による温度
変化がサーモスタット(4)に達すると検知する。した
がって微小出力のレーザビーム(2)の場合、光路がず
れ検出プレート(3)に当っても、温度上昇が小さくサ
ーモスタット(4)が動作しない場合がある。又サーモ
スタット(4)が動作する場合でも、検出プレート(3
)内の熱伝導速度が遅いため、レーザビーム(2)の光
路ずれを検知してレーザ発振を停止するまでの応答時間
が長くなるという種々の問題があった。
In the conventional optical path deviation detection device, as described above, the laser beam (2) with the optical path deviation hits the detection plate (3), the temperature rises, and the temperature change due to heat conduction within the detection plate (3) is caused by the thermostat. It is detected when (4) is reached. Therefore, in the case of a laser beam (2) with a minute output, even if the optical path is misaligned and hits the detection plate (3), the temperature rise is small and the thermostat (4) may not operate. Also, even if the thermostat (4) operates, the detection plate (3)
), there were various problems such as a long response time from detecting the optical path deviation of the laser beam (2) to stopping laser oscillation.

本発明は、かかる問題点を解決するためになされたもの
で、レーザビーム(2)の光路ずれを瞬時に検知する光
路ずれ検出装置を得ることを目的とする。
The present invention has been made to solve such problems, and an object of the present invention is to provide an optical path deviation detection device that instantly detects an optical path deviation of a laser beam (2).

〔問題点を解決するための手段〕[Means for solving problems]

本発明に係るレーザビームの光路ずれ検出装置は、レー
ザビームダクト内に連続した金属線を張り、若しレーザ
ビームが光路をずれた場合は金属線が溶断されるので、
これを検知するようにしたものである。
In the laser beam optical path deviation detection device according to the present invention, a continuous metal wire is stretched inside the laser beam duct, and if the laser beam deviates from the optical path, the metal wire is fused.
It is designed to detect this.

〔作用〕[Effect]

本発明においては、金属線はレーザビームが当ると瞬時
に溶断するので、その溶断を検知してレーザ発振を停止
させるようにしたものである。
In the present invention, since the metal wire melts instantly when hit by the laser beam, the melting is detected and the laser oscillation is stopped.

〔実施例〕〔Example〕

第1図は本発明の一実施例の断面図である。図において
、(6)絶縁材料で形成された円筒状のビームダクトで
あり、穴(力が設けられている。(8)は穴(7)を通
してビームダクト(6)内で角状に交差して張られた1
本の金属細線で、その両端は操作盤(5)のシーケンサ
の端子等に連結されている。なおビームダクト(6)は
金属細線(8)を張る部分のみ絶縁材料で形成してもよ
い。
FIG. 1 is a sectional view of an embodiment of the present invention. In the figure, (6) is a cylindrical beam duct made of insulating material and provided with a hole (force). Stretched 1
It is a thin metal wire, and both ends are connected to the terminals of the sequencer on the operation panel (5). Note that the beam duct (6) may be formed of an insulating material only in the portion where the thin metal wire (8) is stretched.

上記のように構成された光路ずれ検出装置において、発
振器により出力されたレーザビーム(2)は、正常な光
路の場合、角状に交差して張った金属イd線(8)のほ
ぼ中心部を通り抜ける。しかしレーザビーム(2)の光
路がずれると、金属細線(8)に当り、4’;1時に金
属m線(8)を溶断する。溶断すると金属細線(8)の
通電の停止を操作盤(5)で検知して、レーザ発振を止
める。
In the optical path deviation detection device configured as described above, in the case of a normal optical path, the laser beam (2) outputted by the oscillator is located approximately at the center of the metal ID wires (8) stretched across in an angular manner. go through. However, when the optical path of the laser beam (2) deviates, it hits the thin metal wire (8) and melts the metal m-line (8) at 4';1. When it melts, the control panel (5) detects that the thin metal wire (8) is no longer energized and stops laser oscillation.

なお、上記実施例では、金属細線(8)の溶断を通電の
停止で検知したが、金属細線(8)の張力の変化等の他
の要因で検知してもよく、その場合ビームダクト(6)
を絶縁材、科で形成しなくてもよい。
In the above embodiment, the melting of the metal wire (8) was detected by stopping the energization, but it may also be detected by other factors such as a change in the tension of the metal wire (8). )
It does not have to be made of insulation material.

〔発明の効果〕〔Effect of the invention〕

本発明は以上説明したとおり、連続した金属細線をビー
ムダクト同に張るという簡単かつ安価な構造により、レ
ーザビームの光路ずれを瞬時に検知するため、レーザ発
振を停止する応答時間が著しく短かくなり、光路ずれが
生じた際の危険性を少なくする効果がある。
As explained above, the present invention uses a simple and inexpensive structure in which continuous thin metal wires are stretched along the beam duct to instantly detect deviations in the optical path of the laser beam, significantly shortening the response time to stop laser oscillation. This has the effect of reducing the risk when optical path deviation occurs.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す断面図、第2図は従来
の光路ずれ検出装置を示す断面図、第6図は、第2図の
A−A′線に沿った断面図である。 図において、(2)はレーザビーム、15)は操作盤、
(6)はビームダクト、(7)は穴、(8)は金属細線
である。 なお、各図中同一符号は同一または相当部分を示す。 第1コ 竿 2図 4′−′
FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view showing a conventional optical path deviation detection device, and FIG. 6 is a sectional view taken along line A-A' in FIG. be. In the figure, (2) is a laser beam, 15) is an operation panel,
(6) is a beam duct, (7) is a hole, and (8) is a thin metal wire. Note that the same reference numerals in each figure indicate the same or corresponding parts. 1st rod 2 figure 4'-'

Claims (1)

【特許請求の範囲】[Claims] レーザビーム伝送用のレーザビームダクトを有するレー
ザ加工装置において、上記レーザビームダクト内に金属
線を張り、上記レーザビームの光路ずれによる上記金属
線の溶断を検知することを特徴とするレーザビームの光
路ずれ検出装置。
A laser beam processing apparatus having a laser beam duct for laser beam transmission, characterized in that a metal wire is stretched in the laser beam duct, and fusing of the metal wire due to optical path deviation of the laser beam is detected. Misalignment detection device.
JP59210354A 1984-10-09 1984-10-09 Detector for optical path deviation of laser beam Pending JPS6188992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59210354A JPS6188992A (en) 1984-10-09 1984-10-09 Detector for optical path deviation of laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59210354A JPS6188992A (en) 1984-10-09 1984-10-09 Detector for optical path deviation of laser beam

Publications (1)

Publication Number Publication Date
JPS6188992A true JPS6188992A (en) 1986-05-07

Family

ID=16588000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59210354A Pending JPS6188992A (en) 1984-10-09 1984-10-09 Detector for optical path deviation of laser beam

Country Status (1)

Country Link
JP (1) JPS6188992A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06507842A (en) * 1992-04-30 1994-09-08 レクトラ、システム Laser beam machine safety equipment and usage method
EP3029438A3 (en) * 2014-11-15 2016-08-24 MBDA Deutschland GmbH Monitoring device for a laser beam

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06507842A (en) * 1992-04-30 1994-09-08 レクトラ、システム Laser beam machine safety equipment and usage method
EP3029438A3 (en) * 2014-11-15 2016-08-24 MBDA Deutschland GmbH Monitoring device for a laser beam
US10451477B2 (en) 2014-11-15 2019-10-22 Mbda Deutschland Gmbh Monitoring apparatus for a laser beam

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