JPS6188656U - - Google Patents

Info

Publication number
JPS6188656U
JPS6188656U JP17312184U JP17312184U JPS6188656U JP S6188656 U JPS6188656 U JP S6188656U JP 17312184 U JP17312184 U JP 17312184U JP 17312184 U JP17312184 U JP 17312184U JP S6188656 U JPS6188656 U JP S6188656U
Authority
JP
Japan
Prior art keywords
sample
conductor
collecting electrode
electron beam
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17312184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17312184U priority Critical patent/JPS6188656U/ja
Publication of JPS6188656U publication Critical patent/JPS6188656U/ja
Pending legal-status Critical Current

Links

JP17312184U 1984-11-16 1984-11-16 Pending JPS6188656U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17312184U JPS6188656U (sv) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17312184U JPS6188656U (sv) 1984-11-16 1984-11-16

Publications (1)

Publication Number Publication Date
JPS6188656U true JPS6188656U (sv) 1986-06-10

Family

ID=30730781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17312184U Pending JPS6188656U (sv) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPS6188656U (sv)

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