JPS6188510A - Manufacture of ultra small size spiral element - Google Patents

Abstract

PURPOSE:To obtain an ultra small size element by focusing a laser beam on a substrate in a reactive gas ambient and rotating or linearly moving the substrate or focusing point of laser beam. CONSTITUTION:A chamber 1 is exhausted 2, a reaction gas 4 is supplied thereto in order obtain gas ambient and a laser beam is focused in size of several muto a substrate 9 through a lens 11. Position of substrate can be controlled by driving 10 a shaft 8 which can rotate and move straight. The reaction gas generates photo-chemical reaction or thermally decomposes at the laser beam focusing point, a metal component geraminates from the focusing point and grows like a line along the irradiating direction of laser beam. When the substrate 9 moves downward while it is rotated at an adequate speed on the horizontal plane, an ultra small spiral element in the diameter of several hundreds mucan be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION "Industrial Application Field" The present invention relates to a method of manufacturing a micro spiral element using laser light.

``Prior Art'' When making spiral elements such as coils and springs, the common method is to wind wire around a winding frame (bobbin). A small winding frame is used for the Hll that creates the small spiral system.

``Problem to be solved by the invention'' However, assuming an object with an extremely small inductance or a small spring used in an ultra-small device, etc., the equation 1.
When trying to make a so-called micro spiral element with a diameter of 0.00 microns or less, it is necessary to use a micro winding whose size approximately corresponds to the diameter of the micro spiral element. It is extremely difficult to manufacture a spiral element.

The present invention aims to solve such problems.

The method for manufacturing a micro spiral element of the present invention focuses a laser beam on a substrate in a reactive gas atmosphere, and rotates and linearly moves the substrate or the focal point of the sea 1F light. I decided to let him do it.

"Embodiment" FIG. 1 is an example of a micro spiral element manufacturing apparatus for carrying out the present invention.

1 in the figure is a chiton bar, exhaust 1 connected to exhaust device 2]
3. The chamber 1 has a gas supply port 5 connected to the gas supply device 4, and a glass window 7 for allowing laser light from a laser light source 6 disposed outside the chamber 1 to pass into the chamber 1. A substrate 9 is placed within the chamber, which is connected to rotation and linear movement @8. Suitable materials for the substrate include quartz glass and metal. The rotational and linear movement axis 8 is 1! A drive mechanism 10 outside the member allows rotation in the vertical direction, horizontal direction, and around the axis O. Reference numeral 11 denotes an optical lens for focusing the laser light from the laser light source 6 onto the substrate 9.

First, the inside of the chamber is evacuated to a high vacuum state by the exhaust device 2. Next, a reactive gas (for example, an alkyl metal such as trimethylaluminum) is supplied into the chamber from the gas supply device 4 to create a gas atmosphere inside the chamber. In this state, the laser light source 6 is activated, and the laser light from the light source is focused onto the substrate 9 by an optical lens 11 to a size of several microns. At this time, the position of the substrate 9 is controlled by the drive mechanism 10 through the rotation and linear movement shafts 8. When the laser beam is focused on the substrate, the laser beam and the reactive gas cause a photochemical reaction at the focused point, and the reactive gas is thermally decomposed by the laser beam, so that the metal is removed from the laser focused point on the substrate. The ingredients germinate. This germinated metal component grows linearly along the irradiation direction of the 1NO IJ' light. Therefore, at this time, when the substrate 9 is rotated at an appropriate speed on a horizontal plane and moved linearly downward, a spiral-shaped object is generated as shown in FIG. If the substrate is rotated too fast or moved too fast, the growth from the tip of the spiral will be interrupted.With this in mind, the speed of rotation and linear movement of the substrate is controlled by the drive mechanism 10. There is a need to. In this case, the pitch of the spiral-shaped object produced can be controlled by the linear movement speed of the substrate; the faster the speed, the larger the pitch, and the slower the speed, the smaller the pitch. or,
The diameter of this spiral object becomes smaller as the focal point of the laser beam approaches a point on the substrate 9 with a smaller radius of rotation.
The farther away it gets, the bigger it gets. Therefore, for example, when creating a spiral-shaped object with a diameter of several hundred microns, the substrate is moved so that a point on the substrate with a radius of rotation of about 50 microns is located at the focal point of the laser beam. Furthermore, the thickness of the line of the spiral object itself depends on the intensity of the laser beam, the irradiation time to the focal point, and the degree of convergence. In other words, there is a minimum intensity of laser light necessary for the metal component to germinate and grow from the reactive gas, and when this intensity is exceeded, growth occurs approximately in proportion to the intensity, and a spiral shape with a thickness corresponding to the growth occurs. An object is generated. Further, the thickness becomes approximately proportional to the irradiation time of the laser beam to the focal point. Furthermore, the thickness is approximately proportional to the diameter of the convergence of the laser beam.

"Effects of the Invention" According to the present invention, a so-called micro spiral element having a diameter of 100 microns or less can be produced. Furthermore, by changing the type of reaction gas, spiral elements with various properties can be created.

[Brief explanation of drawings]

FIG. 1 shows an example of an apparatus for implementing the present invention, and FIG. 2 is for supplementary explanation of its operation. 1: Chillen bar 2: Exhaust device 3: Exhaust port 4: Gas supply device 5: Gas supply port 6 Laser light source 7: Glass window 8: Rotation and linear movement axis 9: Substrate 10: Drive l1 mechanism 11: Optical lens

Claims (1)

[Claims] Focusing laser light onto the substrate in a reactive gas atmosphere,
A method of manufacturing a micro spiral element in which the substrate or the focal point of the laser beam is rotated and linearly moved.