JPS6188449A - Protective film for reflector - Google Patents

Protective film for reflector

Info

Publication number
JPS6188449A
JPS6188449A JP20983284A JP20983284A JPS6188449A JP S6188449 A JPS6188449 A JP S6188449A JP 20983284 A JP20983284 A JP 20983284A JP 20983284 A JP20983284 A JP 20983284A JP S6188449 A JPS6188449 A JP S6188449A
Authority
JP
Japan
Prior art keywords
reflector
protective film
film
glass
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20983284A
Other languages
Japanese (ja)
Other versions
JPH036619B2 (en
Inventor
勉 高橋
森茂 誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Techno Glass Co Ltd
Original Assignee
Toshiba Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Glass Co Ltd filed Critical Toshiba Glass Co Ltd
Priority to JP20983284A priority Critical patent/JPS6188449A/en
Publication of JPS6188449A publication Critical patent/JPS6188449A/en
Publication of JPH036619B2 publication Critical patent/JPH036619B2/ja
Granted legal-status Critical Current

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  • Glass Compositions (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明:禾たとえば高出力ハロゲン電球の反射体に仮着
さnる多ノ1カ光学fB7の耐久性化向上させる反射体
用保護膜に口する。
Detailed Description of the Invention [Technical Field of the Invention] The present invention provides a protective film for a reflector that improves the durability of a multi-purpose optical fB7 that is temporarily attached to the reflector of, for example, a high-output halogen light bulb. do.

し発明の技術面背景とその問題点〕 従来、反射体としてたとえばハロゲン電球用のレフレク
タにはその中央fこ装貴さねた高圧力ランプからのり視
光を効果的に反射させ、かつ、熱保を吸収するため1反
射面にたとえばZnS−AlgF、 、またはZnS−
8in!のようC:高屈折率蒸着H料と、低重折率蒸着
材料とを交互t:槓、:藝さセてなる多層膜が被着され
ている。ところが、この多層B分はランプ点灯時の高熱
のためそり朗久注f二影“、噂を支はすりで、こnを防
止するため一七C二下把のような手段が採用さねている
[Technical background of the invention and its problems] Conventionally, reflectors for halogen light bulbs, for example, have a central f-shaped structure that effectively reflects the visible light from a high-pressure lamp and that also absorbs heat. For example, ZnS-AlgF, or ZnS-
8in! A multilayer film is deposited in which a high refractive index vapor-deposited H material and a low refractive index vapor-deposited material are alternately deposited. However, due to the high heat generated by the multi-layer B portion when the lamp is lit, there are rumors that measures such as the 17C2 lower cover were adopted to prevent this. ing.

(1)  具窄蒸岩後の多層膜に熱処理を、延こす。(1) Extend heat treatment to the multilayer film after the steaming process.

(2)  特開昭58−5958.号C二開示さ【てい
るようC二真空蒸看後レフレクタをSi 02  溶ン
夜l二&7賃、あるいは溶液を噴射したのち刀0品、石
史化させ多層膜を硬い8i02層で保護する。
(2) Japanese Patent Publication No. 58-5958. As disclosed in No. C2, after vacuum steaming, the reflector is melted with Si02, or after spraying a solution, it is turned into stone and the multilayer film is protected with a hard 8i02 layer. .

しかしながら、上記fil 、 +21の手段はいずn
も低出力ハロゲンランプ、たとえば12V、50W程度
のものに対しては効果的であるが、高出力ハロゲンラン
プ、たとえば100 V 360 Wのものシ一対して
は、多層膜の耐久性を低下させて以下に述べる欠、(を
主じさせる。
However, the above means of fil, +21 is n
Although it is effective against low output halogen lamps, such as 12V and 50W, it reduces the durability of the multilayer film when used against high output halogen lamps, such as 100V and 360W. The following are the main points.

1、 ランプ点灯時にレフレクタの温度が・・L分的に
最高約580℃まで上昇し、多層膜の4’+In、l’
Jクラック、膜表面の白濁、現象等を生じさせる。
1. When the lamp is turned on, the temperature of the reflector rises to a maximum of about 580℃ in L minutes, and the temperature of the multilayer film 4' + In, l' increases.
This causes J-cracks, clouding of the film surface, and other phenomena.

2、  M1j述した(2)の手段では真空蒸着後レフ
レクタを大気中に露出させ、七ののちS10!処理を行
なうので多層股上にじんあいの付着、ピンホール等の発
生を招くこととなる。また、近時多層膜の構成材料とし
てTiO2−810,、またはZrO,−Sin!系の
高耐久性多層膜を使用したハロゲン電球用反射体の開発
がなさr、ているが、このものにあっても以下(二述べ
る欠点を有しているっ l、 多、−膜を被おすべきレフレクタの凹状面が深い
場合、被膜のまわり込みが少なく向−に被着させること
が困1である。
2. M1j In the method (2) mentioned above, the reflector is exposed to the atmosphere after vacuum deposition, and after seven seconds, S10! Since the treatment is carried out, the multi-layered crotch may attract dust and pinholes may occur. In addition, TiO2-810, or ZrO, -Sin! has recently been used as a constituent material for multilayer films. A reflector for halogen light bulbs using a highly durable multi-layer film has not yet been developed, but even this one has the disadvantages described below (2). If the concave surface of the reflector to be applied is deep, it is difficult to apply the coating in the opposite direction because the coating does not wrap around the reflector.

2、  ZnS −MgF2. ZnS −Sin、系
ト比F3 L テ[F18 (膜厚)を1.3ないし1
,5倍必要としてフストり上昇を招く。
2. ZnS-MgF2. ZnS-Sin, system ratio F3 L TE [F18 (film thickness) 1.3 to 1
, 5 times is required, resulting in an increase in flight stability.

3T10□、 ZrO,は薫看条件等C二よっては被膜
−吸収を生じさせたり、または低級酸化膜となり被り=
特性としての安定性を損なわせる。
3T10□, ZrO, depending on the smoking conditions etc., may cause film-absorption or become a lower grade oxide film and overlap =
It impairs the stability as a characteristic.

4 被l’sを除去して再生恭板として使用することが
できない。
4. It is not possible to remove the l's and use it as a recycled board.

〔発明の目的〕[Purpose of the invention]

aJffl力ランプの点灯(=よっても多層膜の膜剥れ
、膜クラツク、表面白濁を生じさせることなく、高耐久
性を可能とし、しかも簡易かつ安価に得らnる反射体用
保護膜を提供することを目的とする。
Provides a protective film for reflectors that enables high durability without causing peeling of multilayer films, film cracks, or surface cloudiness, and that can be obtained simply and inexpensively. The purpose is to

〔発明の概要〕[Summary of the invention]

一面(二条層膜を被着した反射体の多層膜上C:仮仮着
nた反射体用保護膜において、前記保護膜は8i0!8
0ないし85 重量囁1人/2O31.5ないし4.0
 重置%を含有し、かつ熱膨張係数20ないし30 X
IF ” / ℃、屈折率1.46ないし1.47の(
1〕j珪酸ガラスを被着したのち、この(Mn酸ガラス
C二350℃以上転移点以下の温斐で270熱処理を施
してなる反射体用件WL膜である。
One side (on the multilayer film of the reflector coated with the two-layer film C: In the temporarily attached protective film for the reflector, the protective film is 8i0!8
0 to 85 weight whisper 1 person/2O31.5 to 4.0
% and has a coefficient of thermal expansion of 20 to 30
IF”/℃, refractive index 1.46 to 1.47 (
1] This is a reflector material WL film formed by depositing silicate glass and then subjecting it to heat treatment at 270° C. at a temperature of 350° C. or more and below the transition point.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の詳細を一実施例C二ついて図面を参照し
て説明する。(1)は反射体、たとえば/%l Oゲン
ランプ用レフレクタのガラス基板で、−面を回転放物面
状の凹面+21 (:形成してなる。(3)は凹面+2
1C:被るさnた多iM膜テ、 ZnS −MgF’1
まり!i ZnS −810、構成の21盾からなる光
学膜厚1/4λの又互層(λ1〜1s = 600 n
m 、λ1.〜n = 450nm)である。
DETAILED DESCRIPTION OF THE INVENTION Hereinafter, details of the present invention will be explained with reference to one embodiment and two drawings. (1) is a reflector, for example, a glass substrate for a reflector for a /%l O-gen lamp, and the negative surface is formed with a concave surface +21 (:) in the shape of a paraboloid of revolution. (3) is a concave surface +2
1C: Overlapping multi-iM film, ZnS-MgF'1
ball! i ZnS-810, an alternate layer with an optical thickness of 1/4λ consisting of 21 shields (λ1~1s = 600 n
m, λ1. ~n = 450 nm).

すなわち、ZnSからなる高屈折率材料を(H)としM
 gF 2または5in2からなる低屈折率材料を(L
)とした場合、この(H)と(L)とを文旦【二6回計
重2層被るし、さら【:(Hンを1居付加して計131
1!Iとし。
That is, if (H) is a high refractive index material made of ZnS, M
A low refractive index material consisting of gF2 or 5in2 (L
), these (H) and (L) are weighed 26 times, weighed in 2 layers, and further added with 1 layer of pomelo (:(H) for a total of 131
1! I.

さらC(L)と(H)とを又互C:4回、計8層を積層
被イ1し、その最外層C二保護膜(4)となる4ijj
址酸ガラスを被着させたものである。そして、これら?
8!膜の形成はすべて真空蒸着(:よって行なわする。
Further, C (L) and (H) were laminated 4 times, a total of 8 layers, and the outermost layer C2 became the protective film (4).
It is coated with pith glass. And these?
8! All films are formed by vacuum evaporation.

蒸@条件としては真空度s x 10−’ないし1Xl
(J”Torr  で基板温度は100ないし300℃
であった。
Steam @ vacuum degree s x 10-' to 1Xl as conditions
(The substrate temperature is 100 to 300℃ at J” Torr.
Met.

セして保護膜(4)を形成する硼珪酸ガラスは以下ζ;
示す組成ならびに物理的性質を備えている。
The borosilicate glass to be set to form the protective film (4) is as follows ζ;
It has the composition and physical properties shown.

組成        物理的性質 8i02・・・・・・84重重鼠   ル5膨侭率α=
25Xlυ 7℃B2O3・・・・・・11〃    
 光屈折率N=1.47AllO3・・・・ 3 〃 
   転移点Tg = 590℃NえよO 参う嘔・・・・・ 2〃 上記硼珪酸ガラスは光学膜厚1/2λ’ 、u’=55
Qnmのものを電子銃に二より前述した蒸着条件のもと
て蒸着した。蒸着完了後は熱処理を施す。すなわち。
Composition Physical properties 8i02...84 Heavy weight Le5 Swelling rate α=
25Xlυ 7℃B2O3・・・・・・11〃
Optical refractive index N=1.47AllO3... 3
Transition point Tg = 590℃N EyoO... 2〃 The above borosilicate glass has an optical thickness of 1/2λ', u' = 55
Qnm was deposited using an electron gun under the above-mentioned deposition conditions. After the vapor deposition is completed, heat treatment is performed. Namely.

反射体(1)を電気炉中C二人nて450℃% 1時間
の1熱処理を行なって被着を完了することかでさた。
The reflector (1) was heat treated for 1 hour at 450°C by two people in an electric furnace to complete the adhesion.

次表は多層膜(3)の耐久性(二関して保護11弥(4
)を有していない従来のものと1本発明に関するものと
の各種テストの比較実験データを示す。
The following table shows the durability of the multilayer film (3) (with respect to protection 11m (4)
) Comparative experimental data of various tests of a conventional one not having one and one related to the present invention are shown.

(以下余白) 表  1 評価記号 0−変化なし X=膜剥n Y=膜ツクラン ク重表面白濁、干渉むら 試験方法 +IL6.07− ス)  反射体mc too V 
、 360 W ノハロゲン電球(5)を装着し10分
間点灯%10分間/@却を反覆して全体で100時間経
過後の評価。
(Leaving space below) Table 1 Evaluation symbol 0 - No change
, Evaluation after a total of 100 hours had elapsed by attaching a 360 W no-halogen light bulb (5) and repeating lighting for 10 minutes.

(2)熱衝撃テスト 反射体+1]を600℃の中性雰
囲気の電気炉中に二5分分間−た後、大気中ζ二X装置
した場合の評価。
(2) Thermal Shock Test Evaluation was performed when the reflector +1 was placed in an electric furnace in a neutral atmosphere at 600° C. for 25 minutes and then exposed to a ζ2X apparatus in the atmosphere.

(3)煮沸テスト 反射体(1)を100℃の市水中に
10分間浸漬後の評価。
(3) Boiling test Evaluation after immersing the reflector (1) in city water at 100°C for 10 minutes.

(4)引張りテスト 保護膜f4) t:0600のス
コッチテープ幅1/2インチ、長さ10%のものを貼着
し急激(二引剥した場合の評価。
(4) Tensile test Protective film f4) Evaluation when scotch tape of 0600 t: 1/2 inch width and 10% length was applied and suddenly peeled off (two times).

本発明は表−1から明らかなよ5にユ多層Hi31の最
外層I:保設膜(4)として人1itOs含有の硼珪酸
ガラスを被着させたものは保護膜(4)を有していない
ものとはもち論のこと、 8i0.  を被着させた従
来のものと比較して各テストを通じて已めて艮好な結果
を4る二とができた。
As is clear from Table 1, the present invention has a protective film (4) on which borosilicate glass containing 1itOs is deposited as the outermost layer I of the multilayer Hi31 as the preservation film (4). 8i0. In comparison to the conventional one coated with the same material, four times better results were achieved through each test.

このことはC8,護膜(4)の構造がガラス特有のアモ
ルファス層となるため、 8i0.層より緻密に構成さ
れるからと思わnる。
This is because the structure of C8 and the protective film (4) is an amorphous layer unique to glass, so 8i0. I think this is because the structure is more dense than the layers.

久(ニー珪酸ガラスの組成、ならび≦二物理的性質C:
関する限定理由(二ついて述べる。まずSin、は80
ないし85.を叡%、 AI!ys 1.5ないし4.
0型皿%と限定シy= コトハ多m 族系(ZnS −
mgF’、、 ZnS −8i0.)に対応する適正な
熱応力、黙膨弘率が得らするようC二考慮したもので、
さらC:破看後脆処理工程を導入する必要があるので特
C’4 r久性の保護層を構成するためである。また上
記組成内では熱庇張率α=ルないし3oqO−17℃で
あることが週当である。すなわち、αが20 X II
J−’/T:を下回る場合は所望のガラスそのものの作
成が困燕であるとともに:ys m v;<テスト【二
おいて多層に系との熱膨張率の差が生じ膜クラツクの発
生を招く。またαが30XIO’/℃を上回ると8i0
. 、人!、0.以外のガラス構成成分としてアルカリ
(ソーダライム)およびBzOs等が大−に二含まnて
くるため耐湿性に、劣り引張りテスト、煮沸テストで膜
異常、表面白濁が発生する。
(Composition of Ni-silicate glass, and ≦2 physical properties C:
Reasons for limitation regarding
or 85. AI! ys 1.5 to 4.
Type 0 plate% and limited cy = Kotoha multifamily system (ZnS −
mgF', ZnS-8i0. ) in order to obtain appropriate thermal stress and silent expansion coefficient,
Further C: Since it is necessary to introduce an embrittlement treatment process after breaking, it is necessary to introduce a special C'4 r-resistant protective layer. Further, within the above composition, the weekly allowance is that the thermal elongation rate α=1 to 3 oqO-17°C. That is, α is 20
If it is less than J-'/T:, it will be difficult to create the desired glass itself, and at the same time, it will be difficult to create the desired glass itself. invite Also, if α exceeds 30XIO'/℃, 8i0
.. ,Man! ,0. Since the glass mainly contains alkali (soda lime) and BzOs as other glass constituents, the moisture resistance is poor, and film abnormalities and surface clouding occur in tensile tests and boiling tests.

なお、使用する萩逗ガラスはガラス化状T5のものがよ
く焼結晶のものでは電子銃との適合性が悪く好ましくな
い。さらl二は前記人tzosを1.5ないし4.0重
に%C二限定した理由をさら2:付言すると、・1膨張
率との関連のみならずお処理工程【二2ける強化力の向
上を得るためである。
It should be noted that the Hagiwa glass used is preferably vitrified T5, and sintered crystal glass is not preferred because it is poorly compatible with the electron gun. In addition, the reasons for limiting the %C of the human tzos to 1.5 to 4.0 weight are as follows: ・1 Not only is it related to the expansion rate, but also the processing process [22] This is to gain improvement.

また、熱処理工程C二あっては表−1から明らかなよう
に;350℃ないしカラスの転移点温間以内の七〜・込
理イ係度が最適であることを見出した。すなわち、35
0°Cを下回ると従来のものよりは則7..5 <j7
は良いが高出力ランプ用としては不十分となる。まy:
 @:移点渇以を上口ると保護膜(4)の変形が失じク
ラック発生f二いたるおそnがあり、さらC二はZnS
が7.noO)酸化上にする二とがX線回折(二より判
り弓しているため光学T、テ性が短波長側Cニシフトし
、干渉むらを生じさせることとなる。なお、使用]する
+−LX t、:: カラy、 (Il、) j& 折
率N ハ1.46fx イL 1.47−Cj’e学的
l二安定しているため多’11:i>系の光学的特性に
影響を与えることはない。
In addition, as is clear from Table 1, it has been found that in the heat treatment step C2, a temperature coefficient of 7 to 7.degree. C. within the transition temperature of 350.degree. That is, 35
Below 0°C, Rule 7. .. 5 <j7
Although it is good, it is insufficient for high output lamps. May:
@: If the temperature exceeds the transition point, the protective film (4) may lose its deformation and cracks may occur, and C2 is ZnS.
is 7. noO) X-ray diffraction (because it is clearly arched from 2), the optical T and T properties are shifted to the shorter wavelength side, causing interference unevenness. LX t, :: Color y, (Il,) j& Refractive index N Ha1.46fx IL 1.47-Cj'e Since it is stable, it is suitable for the optical properties of poly'11:i> system. It has no effect.

〔発明の効果〕〔Effect of the invention〕

本発明は以上詳述したように多層膜上C二被着さnる保
護膜1−18!0.80ないし85重H”L (y、、
人7t031.5ないし4.0 塩2%含有し、かつ熱
膨張仔数20ないし30刈υ−7/で、屈折率1.46
ないし1.47の硼珪酸ガラスからなり、この硼珪酸ガ
ラスに350℃以上で転移点以下の温ヴで加熱処理を施
こすこと(二より形成さnるようζ二した反射体用保護
膜であるから。
As described in detail above, the present invention provides a protective film 1-18!0.80 to 85 times H"L (y,,
Human 7t031.5 to 4.0 Contains 2% salt, thermal expansion number 20 to 30 υ-7/, refractive index 1.46
This borosilicate glass is made of borosilicate glass with a molecular weight of 1.47 to 1.47, and the borosilicate glass is heat-treated at a temperature of 350°C or higher and below the transition point (with a protective film for a reflector so that it is formed from two layers). because there is.

この反射体C二たとえば高畠力のへロゲンランブを装石
1点灯した場合、その高熱(二よっても多層膜C二はた
んらの変化を生じさせることなく高効率の点灯を保持で
きるすぐtた利点を有する。
When this reflector C2 is lit, for example, Takabatake's herogen lamp, the multilayer film C2 has the immediate advantage of being able to maintain high efficiency lighting without causing any change in temperature due to its high heat (2). has.

さら(二渫護膜は耐久性【二すぐtているととも【二。In addition, the two-layer protective film is said to be very durable.

その格成もすこぶる簡単であるから安価に得ることがで
きる利点をも有する。なお1不実施?+1では保護膜の
被着方法として電子銃による蒸着手段を採用したが本発
明はこnに限らずスパッタリング。
It also has the advantage of being very simple and can be obtained at low cost. In addition, 1 will not be implemented? In +1, vapor deposition using an electron gun was used as a method for depositing the protective film, but the present invention is not limited to this method, but sputtering.

イオンブレーティング等の手段を用いてもよい。Means such as ion blating may also be used.

4   巳 a!] リ :)1)単 〒r LH61
とIA−は本発明り犬話νす’5’ J:すもので、へ
ロゲ/λ球用レフレクタに適用した一部切欠析面Xであ
る。
4 Snake a! ] Re :) 1) Single 〒r LH61
and IA- are the parts of the present invention, and are a partially cut-out surface X applied to a reflector for the Heroge/λ sphere.

ill・・・反射体      )3)・多層膜、4)
・・・(呆1.”i 6’;< 。
ill...Reflector) 3)・Multilayer film, 4)
...(Aghast 1."i 6';<.

Claims (1)

【特許請求の範囲】[Claims] 一面に多層膜を被着した反射体の多層膜上に被着された
反射体用保護膜において、前記保護膜はSiO_280
ないし85重量%、Al_2O_31.5ないし4.0
重量%を含有し、かつ、熱膨張係数20ないし30×1
0^−^7/℃、屈折率1.46ないし1.47の硼珪
酸ガラスを被着したのちこの硼珪酸ガラスに350℃以
上転移点以下の温度で加熱処理してなることを特徴とす
る反射体用保護膜。
In a reflector protective film coated on a multilayer film of a reflector having a multilayer film coated on one side, the protective film is made of SiO_280
85% by weight, Al_2O_31.5 to 4.0
% by weight and a thermal expansion coefficient of 20 to 30×1
It is characterized by being formed by depositing borosilicate glass with a refractive index of 0^-^7/°C and a refractive index of 1.46 to 1.47, and then heat-treating the borosilicate glass at a temperature of 350°C or higher and below the transition point. Protective film for reflectors.
JP20983284A 1984-10-08 1984-10-08 Protective film for reflector Granted JPS6188449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20983284A JPS6188449A (en) 1984-10-08 1984-10-08 Protective film for reflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20983284A JPS6188449A (en) 1984-10-08 1984-10-08 Protective film for reflector

Publications (2)

Publication Number Publication Date
JPS6188449A true JPS6188449A (en) 1986-05-06
JPH036619B2 JPH036619B2 (en) 1991-01-30

Family

ID=16579353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20983284A Granted JPS6188449A (en) 1984-10-08 1984-10-08 Protective film for reflector

Country Status (1)

Country Link
JP (1) JPS6188449A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01319244A (en) * 1988-06-21 1989-12-25 Ushio Inc Manufacture of electric bulb
JPH02161403A (en) * 1988-12-15 1990-06-21 Toshiba Glass Co Ltd Multilayered interference film
EP0702395A3 (en) * 1994-09-13 1997-01-29 Gen Electric Lamp having silica protective coating

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01319244A (en) * 1988-06-21 1989-12-25 Ushio Inc Manufacture of electric bulb
JPH02161403A (en) * 1988-12-15 1990-06-21 Toshiba Glass Co Ltd Multilayered interference film
EP0702395A3 (en) * 1994-09-13 1997-01-29 Gen Electric Lamp having silica protective coating

Also Published As

Publication number Publication date
JPH036619B2 (en) 1991-01-30

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