JPS6188242U - - Google Patents

Info

Publication number
JPS6188242U
JPS6188242U JP17471784U JP17471784U JPS6188242U JP S6188242 U JPS6188242 U JP S6188242U JP 17471784 U JP17471784 U JP 17471784U JP 17471784 U JP17471784 U JP 17471784U JP S6188242 U JPS6188242 U JP S6188242U
Authority
JP
Japan
Prior art keywords
boat
semiconductor wafer
support device
wafer support
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17471784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17471784U priority Critical patent/JPS6188242U/ja
Publication of JPS6188242U publication Critical patent/JPS6188242U/ja
Pending legal-status Critical Current

Links

JP17471784U 1984-11-16 1984-11-16 Pending JPS6188242U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17471784U JPS6188242U (US07709020-20100504-C00041.png) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17471784U JPS6188242U (US07709020-20100504-C00041.png) 1984-11-16 1984-11-16

Publications (1)

Publication Number Publication Date
JPS6188242U true JPS6188242U (US07709020-20100504-C00041.png) 1986-06-09

Family

ID=30732332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17471784U Pending JPS6188242U (US07709020-20100504-C00041.png) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPS6188242U (US07709020-20100504-C00041.png)

Similar Documents

Publication Publication Date Title
JPS6188242U (US07709020-20100504-C00041.png)
JPS6219732U (US07709020-20100504-C00041.png)
JPS5956742U (ja) 半導体素子取扱いリング
JPS624132U (US07709020-20100504-C00041.png)
JPS62107452U (US07709020-20100504-C00041.png)
JPS6151375U (US07709020-20100504-C00041.png)
JPS62172153U (US07709020-20100504-C00041.png)
JPH022828U (US07709020-20100504-C00041.png)
JPS61119345U (US07709020-20100504-C00041.png)
JPS62160557U (US07709020-20100504-C00041.png)
JPH0231154U (US07709020-20100504-C00041.png)
JPH0258364U (US07709020-20100504-C00041.png)
JPS6429824U (US07709020-20100504-C00041.png)
JPS6380848U (US07709020-20100504-C00041.png)
JPS5916140U (ja) 半導体ウエハ−ス用キヤリア
JPS6188233U (US07709020-20100504-C00041.png)
JPS6122347U (ja) 半導体ウエハ保持用ボ−ト
JPS6194348U (US07709020-20100504-C00041.png)
JPS62184747U (US07709020-20100504-C00041.png)
JPS62120340U (US07709020-20100504-C00041.png)
JPS58158455U (ja) 半導体装置
JPS6185165U (US07709020-20100504-C00041.png)
JPH01104021U (US07709020-20100504-C00041.png)
JPS63159820U (US07709020-20100504-C00041.png)
JPS63131137U (US07709020-20100504-C00041.png)