JPS6187338U - - Google Patents
Info
- Publication number
- JPS6187338U JPS6187338U JP17268884U JP17268884U JPS6187338U JP S6187338 U JPS6187338 U JP S6187338U JP 17268884 U JP17268884 U JP 17268884U JP 17268884 U JP17268884 U JP 17268884U JP S6187338 U JPS6187338 U JP S6187338U
- Authority
- JP
- Japan
- Prior art keywords
- stem
- pressure
- semiconductor chip
- opening
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17268884U JPS6187338U (ko) | 1984-11-14 | 1984-11-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17268884U JPS6187338U (ko) | 1984-11-14 | 1984-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6187338U true JPS6187338U (ko) | 1986-06-07 |
Family
ID=30730350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17268884U Pending JPS6187338U (ko) | 1984-11-14 | 1984-11-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6187338U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012233872A (ja) * | 2010-12-13 | 2012-11-29 | Panasonic Corp | 半導体圧力センサおよびその製造方法 |
US11901172B2 (en) | 2014-04-01 | 2024-02-13 | Ev Group E. Thallner Gmbh | Method and device for the surface treatment of substrates |
-
1984
- 1984-11-14 JP JP17268884U patent/JPS6187338U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012233872A (ja) * | 2010-12-13 | 2012-11-29 | Panasonic Corp | 半導体圧力センサおよびその製造方法 |
US11901172B2 (en) | 2014-04-01 | 2024-02-13 | Ev Group E. Thallner Gmbh | Method and device for the surface treatment of substrates |