JPS6186934U - - Google Patents

Info

Publication number

JPS6186934U

JPS6186934U JP17037884U JP17037884U JPS6186934U JP S6186934 U JPS6186934 U JP S6186934U JP 17037884 U JP17037884 U JP 17037884U JP 17037884 U JP17037884 U JP 17037884U JP S6186934 U JPS6186934 U JP S6186934U

Authority

JP

Japan

Prior art keywords

wafer

heat source

bell jar

entire surface

uniformly heating

Prior art date

1984-11-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 4
• 235000012431 wafers Nutrition 0.000 claims 4
• 238000001816 cooling Methods 0.000 description 1
• 239000011261 inert gas Substances 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1

Cited By (1)