JPS6186927U - - Google Patents

Info

Publication number
JPS6186927U
JPS6186927U JP17034084U JP17034084U JPS6186927U JP S6186927 U JPS6186927 U JP S6186927U JP 17034084 U JP17034084 U JP 17034084U JP 17034084 U JP17034084 U JP 17034084U JP S6186927 U JPS6186927 U JP S6186927U
Authority
JP
Japan
Prior art keywords
hood
resist
hole
resist coating
vacuum chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17034084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17034084U priority Critical patent/JPS6186927U/ja
Publication of JPS6186927U publication Critical patent/JPS6186927U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP17034084U 1984-11-12 1984-11-12 Pending JPS6186927U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17034084U JPS6186927U (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17034084U JPS6186927U (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS6186927U true JPS6186927U (enrdf_load_stackoverflow) 1986-06-07

Family

ID=30728045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17034084U Pending JPS6186927U (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6186927U (enrdf_load_stackoverflow)

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