JPS6186815A - Minute pressure controller - Google Patents

Minute pressure controller

Info

Publication number
JPS6186815A
JPS6186815A JP20815884A JP20815884A JPS6186815A JP S6186815 A JPS6186815 A JP S6186815A JP 20815884 A JP20815884 A JP 20815884A JP 20815884 A JP20815884 A JP 20815884A JP S6186815 A JPS6186815 A JP S6186815A
Authority
JP
Japan
Prior art keywords
gas
pressure
valve
switch
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20815884A
Inventor
Toru Otsubo
Masayoshi Serizawa
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20815884A priority Critical patent/JPS6186815A/en
Publication of JPS6186815A publication Critical patent/JPS6186815A/en
Application status is Pending legal-status Critical

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2006Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/2033Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged in series

Abstract

PURPOSE:To control the pressure of the gas supplied between wafer electrodes to a fixed level by providing two buffer rooms and reducing the pressure level in two steps for the control of pressure. CONSTITUTION:The gas delivered from a gas cylinder 5 serving as a gas supply source and a pressure control valve 6 is led to the 2nd pressure control mechanism part consisting of a throttle valve 7, a pneumatic switch valve 12, a buffer room 13 and a diaphragm vacuum gauge 14 connected in series to each other via the 1st pressure control mechanism part consisting of a throttle valve 7, a pneumatic switch valve 8, a buffer room 9 and a vacuum switch 10. The pressure of the gas reduced through said two control mechanism parts is detected by the switch 10 and the gauge 14. A controller 17 controls both valves 8 and 12 by the output signal given from a meter relay 16 connected to the switch 10 and the gauge 14. Then the gas undergone with the pressure control is led between a wafer 4 and a lower electrode 2 within a vacuum container 1 via a pneumatic switch valve 18 which feeds and stops the gas.
JP20815884A 1984-10-05 1984-10-05 Minute pressure controller Pending JPS6186815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20815884A JPS6186815A (en) 1984-10-05 1984-10-05 Minute pressure controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20815884A JPS6186815A (en) 1984-10-05 1984-10-05 Minute pressure controller

Publications (1)

Publication Number Publication Date
JPS6186815A true JPS6186815A (en) 1986-05-02

Family

ID=16551610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20815884A Pending JPS6186815A (en) 1984-10-05 1984-10-05 Minute pressure controller

Country Status (1)

Country Link
JP (1) JPS6186815A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237532A (en) * 2005-02-28 2006-09-07 Hitachi Kokusai Electric Inc Substrate processing apparatus
JP2010537796A (en) * 2007-05-11 2010-12-09 エスディーシー マテリアルズ インコーポレイテッド Gas supply system and gas supply method
US8859035B1 (en) 2009-12-15 2014-10-14 SDCmaterials, Inc. Powder treatment for enhanced flowability
US8865611B2 (en) 2009-12-15 2014-10-21 SDCmaterials, Inc. Method of forming a catalyst with inhibited mobility of nano-active material
US8969237B2 (en) 2011-08-19 2015-03-03 SDCmaterials, Inc. Coated substrates for use in catalysis and catalytic converters and methods of coating substrates with washcoat compositions
US9089840B2 (en) 2007-10-15 2015-07-28 SDCmaterials, Inc. Method and system for forming plug and play oxide catalysts
US9126191B2 (en) 2009-12-15 2015-09-08 SDCmaterials, Inc. Advanced catalysts for automotive applications
US9149797B2 (en) 2009-12-15 2015-10-06 SDCmaterials, Inc. Catalyst production method and system
US9156025B2 (en) 2012-11-21 2015-10-13 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9216406B2 (en) 2011-02-23 2015-12-22 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PtPd catalysts
US9427732B2 (en) 2013-10-22 2016-08-30 SDCmaterials, Inc. Catalyst design for heavy-duty diesel combustion engines
US9511352B2 (en) 2012-11-21 2016-12-06 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9517448B2 (en) 2013-10-22 2016-12-13 SDCmaterials, Inc. Compositions of lean NOx trap (LNT) systems and methods of making and using same
US9522388B2 (en) 2009-12-15 2016-12-20 SDCmaterials, Inc. Pinning and affixing nano-active material
US9586179B2 (en) 2013-07-25 2017-03-07 SDCmaterials, Inc. Washcoats and coated substrates for catalytic converters and methods of making and using same
US9687811B2 (en) 2014-03-21 2017-06-27 SDCmaterials, Inc. Compositions for passive NOx adsorption (PNA) systems and methods of making and using same

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4566787B2 (en) * 2005-02-28 2010-10-20 株式会社日立国際電気 Method for manufacturing a substrate processing apparatus and a semiconductor device
JP2006237532A (en) * 2005-02-28 2006-09-07 Hitachi Kokusai Electric Inc Substrate processing apparatus
US9216398B2 (en) 2005-04-19 2015-12-22 SDCmaterials, Inc. Method and apparatus for making uniform and ultrasmall nanoparticles
US9719727B2 (en) 2005-04-19 2017-08-01 SDCmaterials, Inc. Fluid recirculation system for use in vapor phase particle production system
US9023754B2 (en) 2005-04-19 2015-05-05 SDCmaterials, Inc. Nano-skeletal catalyst
US9180423B2 (en) 2005-04-19 2015-11-10 SDCmaterials, Inc. Highly turbulent quench chamber
US9599405B2 (en) 2005-04-19 2017-03-21 SDCmaterials, Inc. Highly turbulent quench chamber
US9132404B2 (en) 2005-04-19 2015-09-15 SDCmaterials, Inc. Gas delivery system with constant overpressure relative to ambient to system with varying vacuum suction
US8956574B2 (en) 2007-05-11 2015-02-17 SDCmaterials, Inc. Gas delivery system with constant overpressure relative to ambient to system with varying vacuum suction
US8893651B1 (en) 2007-05-11 2014-11-25 SDCmaterials, Inc. Plasma-arc vaporization chamber with wide bore
US8906316B2 (en) 2007-05-11 2014-12-09 SDCmaterials, Inc. Fluid recirculation system for use in vapor phase particle production system
JP2010537796A (en) * 2007-05-11 2010-12-09 エスディーシー マテリアルズ インコーポレイテッド Gas supply system and gas supply method
US9737878B2 (en) 2007-10-15 2017-08-22 SDCmaterials, Inc. Method and system for forming plug and play metal catalysts
US9302260B2 (en) 2007-10-15 2016-04-05 SDCmaterials, Inc. Method and system for forming plug and play metal catalysts
US9597662B2 (en) 2007-10-15 2017-03-21 SDCmaterials, Inc. Method and system for forming plug and play metal compound catalysts
US9089840B2 (en) 2007-10-15 2015-07-28 SDCmaterials, Inc. Method and system for forming plug and play oxide catalysts
US9186663B2 (en) 2007-10-15 2015-11-17 SDCmaterials, Inc. Method and system for forming plug and play metal compound catalysts
US9592492B2 (en) 2007-10-15 2017-03-14 SDCmaterials, Inc. Method and system for forming plug and play oxide catalysts
US9126191B2 (en) 2009-12-15 2015-09-08 SDCmaterials, Inc. Advanced catalysts for automotive applications
US8992820B1 (en) 2009-12-15 2015-03-31 SDCmaterials, Inc. Fracture toughness of ceramics
US8877357B1 (en) 2009-12-15 2014-11-04 SDCmaterials, Inc. Impact resistant material
US8932514B1 (en) 2009-12-15 2015-01-13 SDCmaterials, Inc. Fracture toughness of glass
US8906498B1 (en) 2009-12-15 2014-12-09 SDCmaterials, Inc. Sandwich of impact resistant material
US8865611B2 (en) 2009-12-15 2014-10-21 SDCmaterials, Inc. Method of forming a catalyst with inhibited mobility of nano-active material
US9308524B2 (en) 2009-12-15 2016-04-12 SDCmaterials, Inc. Advanced catalysts for automotive applications
US9332636B2 (en) 2009-12-15 2016-05-03 SDCmaterials, Inc. Sandwich of impact resistant material
US8859035B1 (en) 2009-12-15 2014-10-14 SDCmaterials, Inc. Powder treatment for enhanced flowability
US9522388B2 (en) 2009-12-15 2016-12-20 SDCmaterials, Inc. Pinning and affixing nano-active material
US9149797B2 (en) 2009-12-15 2015-10-06 SDCmaterials, Inc. Catalyst production method and system
US9533289B2 (en) 2009-12-15 2017-01-03 SDCmaterials, Inc. Advanced catalysts for automotive applications
US9216406B2 (en) 2011-02-23 2015-12-22 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PtPd catalysts
US9433938B2 (en) 2011-02-23 2016-09-06 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PTPD catalysts
US8969237B2 (en) 2011-08-19 2015-03-03 SDCmaterials, Inc. Coated substrates for use in catalysis and catalytic converters and methods of coating substrates with washcoat compositions
US9498751B2 (en) 2011-08-19 2016-11-22 SDCmaterials, Inc. Coated substrates for use in catalysis and catalytic converters and methods of coating substrates with washcoat compositions
US9533299B2 (en) 2012-11-21 2017-01-03 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9156025B2 (en) 2012-11-21 2015-10-13 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9511352B2 (en) 2012-11-21 2016-12-06 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9586179B2 (en) 2013-07-25 2017-03-07 SDCmaterials, Inc. Washcoats and coated substrates for catalytic converters and methods of making and using same
US9517448B2 (en) 2013-10-22 2016-12-13 SDCmaterials, Inc. Compositions of lean NOx trap (LNT) systems and methods of making and using same
US9566568B2 (en) 2013-10-22 2017-02-14 SDCmaterials, Inc. Catalyst design for heavy-duty diesel combustion engines
US9950316B2 (en) 2013-10-22 2018-04-24 Umicore Ag & Co. Kg Catalyst design for heavy-duty diesel combustion engines
US9427732B2 (en) 2013-10-22 2016-08-30 SDCmaterials, Inc. Catalyst design for heavy-duty diesel combustion engines
US10086356B2 (en) 2014-03-21 2018-10-02 Umicore Ag & Co. Kg Compositions for passive NOx adsorption (PNA) systems and methods of making and using same
US9687811B2 (en) 2014-03-21 2017-06-27 SDCmaterials, Inc. Compositions for passive NOx adsorption (PNA) systems and methods of making and using same

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