JPS6186423A - Preparation of compound bismuth oxide - Google Patents

Preparation of compound bismuth oxide

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Publication number
JPS6186423A
JPS6186423A JP20717184A JP20717184A JPS6186423A JP S6186423 A JPS6186423 A JP S6186423A JP 20717184 A JP20717184 A JP 20717184A JP 20717184 A JP20717184 A JP 20717184A JP S6186423 A JPS6186423 A JP S6186423A
Authority
JP
Japan
Prior art keywords
alkoxide
bismuth
reaction product
reaction
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20717184A
Other languages
Japanese (ja)
Inventor
Yoshiharu Ozaki
尾崎 義治
Mitsushi Wadasako
三志 和田迫
Masa Kubota
雅 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Mining and Cement Co Ltd
Original Assignee
Mitsubishi Mining and Cement Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Mining and Cement Co Ltd filed Critical Mitsubishi Mining and Cement Co Ltd
Priority to JP20717184A priority Critical patent/JPS6186423A/en
Publication of JPS6186423A publication Critical patent/JPS6186423A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain fine particles of compound bismuth oxide having uniform compsn. and high purity by allowing >= two kinds of alkoxide cong. Bi alkoxide to react with each other and hydrolyzing the reaction product and calcining the hydrolyzed product thereafter. CONSTITUTION:Bi alkoxide is mixed with at least one kind of alkoxide of Ba, Sr, Ca, Pb and/or Mo, W, Nb, Ta, Ti, etc. in an org. solvent (e.g. benzene) at 0-100 deg.C to cause reaction. Decarboxylated distilled water is added to the soln. of the reaction product at 0-100 deg.C, or steam is blown out of a pressurized vessel at 100-200 deg.C to contact with the reaction product and to hydrolyze the reaction product, to obtn. powdery white precipitate. Then, the precipitate is filtered and dried, and calcined then at >=600 deg.C and < an initiating temp. of decomposition of the compound oxide. Thus, a compound Bi oxide having high purity contg. <=0.1wt% impurity and 0.01-0.1 micron particle size being expressed by the formula (where A is Ba, Sr, Ca, Pb; B is Mo, W, when n=1; Nb, Ta, when n=2; Nb, Ti, etc. when n=3).

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、アルコキシドの加水分解反応により層状化合
物のビスマス複酸化物の製造方法に関する。更に詳しく
は強誘電材料として電子材料に適するビスマス複酸化物
の製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing bismuth double oxide, which is a layered compound, by a hydrolysis reaction of an alkoxide. More specifically, the present invention relates to a method for producing bismuth double oxide, which is a ferroelectric material suitable for electronic materials.

[従来の技術] 従来、ビスマス複酸化物は、各々の成分元素の酸化物を
混合し、仮焼−粉砕の工程を繰り返し行うことによって
製造されている。
[Prior Art] Conventionally, bismuth double oxide has been manufactured by mixing oxides of each component element and repeatedly performing a calcining and pulverizing process.

[発明が解決しようとする問題点] 近年、電子部品に対し、より小型で高度な特性が要求さ
れるようになり、従ってそれに使用される原料粉体も、
従来に増して組成の均−性及び高純度微粒子であること
が必要になってきている。
[Problems to be solved by the invention] In recent years, electronic components have been required to be smaller and have more advanced characteristics, and therefore the raw material powder used for them has also become smaller.
More than ever before, it has become necessary to have uniform composition and highly purified fine particles.

しかし、従来の方法によると、得られたビスマス複酸化
物は、微視的に観察した場合に各成分元素の酸化物が均
一に分布又は反応するとは限らず組成が不均質になり易
く、その特性を安定させることは困難であった。また粉
砕時に粉砕装置から不純物が混入し易く、誘電材料とし
ての特性が低下してしまう問題点があった。
However, according to the conventional method, the obtained bismuth double oxide tends to have a non-uniform composition when observed microscopically because the oxides of each component element do not always distribute or react uniformly. It was difficult to stabilize the characteristics. In addition, there is a problem in that impurities are easily mixed in from the crushing device during crushing, resulting in deterioration of the properties as a dielectric material.

本発明の目的は、ビスマス複酸化物を均一な組成でかつ
高純度で微粒に製造し得る方法を提供することにある。
An object of the present invention is to provide a method for producing fine particles of bismuth double oxide with uniform composition and high purity.

[問題点を解決するための手段] 本発明は、少なくともビスマスアルコキシドを含む2種
以上のアルコキシドを混合して反応させ、この反応生成
物を加水分解した後、この加水分解生成物を仮焼してビ
スマス複酸化物を得る方法である。
[Means for Solving the Problems] The present invention involves mixing and reacting two or more alkoxides containing at least bismuth alkoxide, hydrolyzing the reaction product, and then calcining the hydrolysis product. This is a method to obtain bismuth double oxide.

なおビスマス複酸化物は(Bi2(h)”″(A n−
IBn 03 n−+ F(但し、AはBa、Sr、C
a又はPb、 Bはn=1のときMo又はW、n=2の
ときNb又はTa、n=3のときNb又はTi、  n
 = 4.5又は8のときTi) c7)構造をとるこ
とができる。
The bismuth double oxide is (Bi2(h)""(A n-
IBn 03 n-+ F (However, A is Ba, Sr, C
a or Pb, B is Mo or W when n=1, Nb or Ta when n=2, Nb or Ti when n=3, n
= 4.5 or 8, Ti) c7) structure can be taken.

本明細書で「アルコキシド」とはアルコールのOH基の
水素元素を金属元素で置換した化合物をいう。
As used herein, "alkoxide" refers to a compound in which the hydrogen element of the OH group of alcohol is replaced with a metal element.

本発明の出発原料は、ビスマスアルコキシドを含む2種
以上のアルコキシドであってビスマスアルコキシド以外
のアルコキシドとしては、バリウムアルコキシド、スト
ロンチウムアルコキシド、カルシウムアルコキシド、鉛
アルコキシド、モリブデンアルコキシド、タングステン
アルコキシド、ニオブアルコキシド、タンタルアルコキ
シド、チタンアルコキシドがある。本発明はビスマスア
ルコキシドの外に、上記アルコキシドの中から1種又は
2種のアルコキシドを選定して組合せた2種又は3種の
アルコキシドを出発原料とする。
The starting materials of the present invention are two or more alkoxides including bismuth alkoxide, and the alkoxides other than bismuth alkoxide include barium alkoxide, strontium alkoxide, calcium alkoxide, lead alkoxide, molybdenum alkoxide, tungsten alkoxide, niobium alkoxide, and tantalum alkoxide. , titanium alkoxide. In the present invention, in addition to bismuth alkoxide, two or three alkoxides, which are a combination of one or two alkoxides selected from the above alkoxides, are used as starting materials.

上記2種又は3種の組合せの各々の成分アルコキシドを
所望の組成に混合して反応させる。この場合混合及び反
応は有機溶媒中で行うことが好ましい。これは混合の便
宜を図り反応を促進させるとともに後述の加水分解によ
り生じる沈殿物の組成を混合した組成に一致させるため
である。この有機溶媒としては、ベンゼン、アルコール
、トルエン、キシレン等が適当であるが、溶解度が高い
ことからベンゼンが最適である。反応温度が各成分アル
コキシドが分解する温度未満であれば差支えないが、取
扱いの便宜のために0〜100℃、特に望ましい温度は
40〜100℃である。
The component alkoxides of each of the above two or three combinations are mixed to a desired composition and reacted. In this case, the mixing and reaction are preferably carried out in an organic solvent. This is for the purpose of facilitating mixing, promoting the reaction, and making the composition of the precipitate produced by hydrolysis, which will be described later, match the composition of the mixture. As this organic solvent, benzene, alcohol, toluene, xylene, etc. are suitable, but benzene is most suitable because of its high solubility. There is no problem as long as the reaction temperature is lower than the temperature at which each component alkoxide decomposes, but for convenience of handling, the reaction temperature is 0 to 100°C, particularly preferably 40 to 100°C.

」二足混合及び反応により生成された反応生成物の加水
分解は、反応溶液中に脱炭酸した蒸留水を直接加えるこ
とにより行うことができる以外に、加圧容器から吹出す
水蒸気に反応生成物を接触させる方法でも行うことがで
きる。この加水分解のための反応温度は、加圧しない状
!Eでは、各成分アルコキシドが分解せずしかも取扱い
の容易な0〜100℃の範囲、特に望ましい温度は25
〜100℃である。加圧して行う場合、或いは水蒸気流
に接触させる方法では100〜200℃が適当である。
Hydrolysis of the reaction product produced by two-leg mixing and reaction can be carried out by directly adding decarboxylated distilled water into the reaction solution. This can also be done by contacting the The reaction temperature for this hydrolysis is such that no pressure is applied! For E, each component alkoxide does not decompose and is easy to handle in the range of 0 to 100°C, particularly preferably at a temperature of 25°C.
~100°C. In the case of applying pressure or contacting with a steam stream, a temperature of 100 to 200°C is appropriate.

この加水分解により粉末状の白色沈殿物が生成する。こ
の沈殿物を遠心分離又は濾過により加水分解液から分離
し、必要により真空乾燥等の乾燥を行えば、粉体が得ら
れる。
This hydrolysis produces a powdery white precipitate. This precipitate is separated from the hydrolyzed solution by centrifugation or filtration, and if necessary, drying such as vacuum drying is performed to obtain a powder.

4−2反応により得られた粉体をX線回折、熱分析及び
電子顕微鏡観察により物性及び構造を調べる。加水分解
生成物のままの状態では非晶質のビスマス複酸化物であ
ることが多いが、仮焼により容易に結晶質のビスマス複
酸化物を得ることができる。この仮焼温度は、結晶質へ
の転移効率を向上させるために、 600℃以上であっ
てビスマス複酸化物の分解開始温度未満であることが好
ましいが、更に低い温度でも或いは真空加熱によっても
得ることができる。
4-2 Examine the physical properties and structure of the powder obtained by the reaction by X-ray diffraction, thermal analysis, and electron microscopy. Although the hydrolysis product as it is is often an amorphous bismuth double oxide, a crystalline bismuth double oxide can be easily obtained by calcination. The calcination temperature is preferably 600°C or higher and lower than the decomposition start temperature of the bismuth double oxide in order to improve the efficiency of the transition to the crystalline state, but it can also be obtained at a lower temperature or by vacuum heating. be able to.

特に出発原料をビスマスアルコキシドと2価金属のBa
 、Sr 、Ca 、Pbのアルコキシドとを含む3種
のアルコキシドとした場合には、次の構造式のビスマス
複酸化物が得られる。
In particular, the starting materials are bismuth alkoxide and divalent metal Ba.
, Sr 2 , Ca 2 , and Pb alkoxides, a bismuth double oxide having the following structural formula can be obtained.

(BizOz)” (An+tBnOin++))・−
−−−−−−(1)(但し、AはBa 、Sr、Ca又
はPb、 Bはn=1(7)ときMo又はW、n=2の
ときNb又はTa、n=3のときNb又はTi、  n
 = 4.5又は8のときTaテある。)仮焼により得
られたビスマス複酸化物は化学分析の結果、不純物0.
1%以下の高純度の物質であり、また電子顕微鏡観察に
よると、0.01〜 (111Lmの粒径の微粒子であ
る。また金属原子の各成分組成比は極めて化学量論比に
近いものであることが確認できる。
(BizOz)” (An+tBnOin++))・-
--------(1) (However, A is Ba, Sr, Ca or Pb, B is Mo or W when n=1 (7), Nb or Ta when n=2, Nb when n=3 or Ti, n
= 4.5 or 8, there is Tate. ) As a result of chemical analysis, the bismuth double oxide obtained by calcination showed no impurities.
It is a substance with a high purity of 1% or less, and according to electron microscope observation, it is a fine particle with a particle size of 0.01 to 111 Lm.Also, the composition ratio of each component of metal atoms is extremely close to the stoichiometric ratio. I can confirm that there is.

[発明の効果] 以上述べたように1本発明のよれば、従来のように粉砕
工程を経ることなく、少ないエネルギー消費で高純度で
微粒のビスマス複酸化物を目標とする原子比に極めて近
く、均一に製造することができる優れた効果がある。
[Effects of the Invention] As described above, according to the present invention, high purity, fine-grained bismuth double oxide can be produced with an atomic ratio extremely close to the target, without the conventional pulverization process, and with low energy consumption. , it has the excellent effect of being able to be manufactured uniformly.

[実施例] 次に本発明の具体的態様を示すために、本発明を実施例
により更に詳しく説明するが以下に示す例はあくまでも
一例であって、これにより本発明の技術的範囲を限定す
るものではない。
[Examples] Next, in order to show specific embodiments of the present invention, the present invention will be explained in more detail using Examples, but the examples shown below are merely examples, and the technical scope of the present invention is limited thereby. It's not a thing.

〈実施例1〉 高純度の金属ナトリウム6.8gを採り、これを脱水し
たエタノール 100gに加えて反応させナトリウムエ
トキシドを合成し、それに無水塩化ビスマスBiCIx
 31.5gを加え、約80℃で2時間加熱還流するこ
とによりビスマスエトキシドBi(OEthを得た。
<Example 1> 6.8 g of high-purity metallic sodium was taken, added to 100 g of dehydrated ethanol, reacted to synthesize sodium ethoxide, and anhydrous bismuth chloride BiCIx
Bismuth ethoxide Bi (OEth) was obtained by adding 31.5 g of the mixture and heating under reflux at about 80° C. for 2 hours.

得られたビスマスエトキシドと市販のチタニウムイソプ
ロポキシドTi(OPr’)4とを原子比がBi/Ti
=  8/1.4/3.1/2となるように混合し、そ
れぞれ約80℃で1時間還流反応させる。次いで還流し
たまま脱炭酸した蒸留水50Il!lを少量ずつ滴下し
てそれぞれ加水分解したところ、いずれの反応系にも白
色の粉末状の沈殿物が生成した。沈殿物を濾過により加
水分解液からそれぞれ分離した後、70℃で20時間乾
燥して3種類の粉体を得た。
The obtained bismuth ethoxide and commercially available titanium isopropoxide Ti(OPr')4 were mixed in an atomic ratio of Bi/Ti.
= 8/1.4/3.1/2 and reacted under reflux at about 80°C for 1 hour. Next, 50 Il of distilled water was decarboxylated while refluxing! When 1 was added dropwise little by little and hydrolyzed, a white powdery precipitate was formed in each reaction system. The precipitates were separated from the hydrolyzed solution by filtration, and then dried at 70° C. for 20 hours to obtain three types of powder.

得られた3種・類の粉体をX線回折、示差熱分析、熱重
量分析により性状を調べた。またこれらの粉体をそれぞ
れ400℃、600℃、 800℃、 1000℃と段
階的に温度を変えて仮焼し、X線回折によりその構造を
調べた。第1表にX線回折の分析結果を示す。
The properties of the three types of powders obtained were examined by X-ray diffraction, differential thermal analysis, and thermogravimetric analysis. Furthermore, these powders were calcined at temperatures of 400°C, 600°C, 800°C, and 1000°C, respectively, and their structures were investigated by X-ray diffraction. Table 1 shows the results of X-ray diffraction analysis.

(以下本頁余白) 第1表 第1表から3種類の粉体は、いずれも加水分解生成物及
び400℃以下の仮焼時には非晶質であり、600℃以
りの仮焼により単−相の結晶質の目標物質が得られるこ
とを確認した。
(Hereinafter, the margin of this page) Table 1 The three types of powders shown in Table 1 are all hydrolysis products and are amorphous when calcined at 400°C or lower, and monolithic when calcined at 600°C or higher. It was confirmed that a crystalline target material could be obtained.

また得られた粉体を分析電子顕微鏡によりその粒径観察
と組成分析を行った。その結果、いずれの粉体も加水分
解生成物の粒径は数10人であり、800℃仮焼後の粒
径は1000人(0,1ル厖)であった。また組成分析
の結果は各粒子の組成がバッチ組成と良く一致した。
The obtained powder was also subjected to particle size observation and composition analysis using an analytical electron microscope. As a result, the particle size of the hydrolyzed product of each powder was several tens of particles, and the particle size after calcination at 800° C. was 1000 particles (0.1 l). In addition, the composition analysis results showed that the composition of each particle was in good agreement with the batch composition.

〈実施例2〉 前述した(1)式の構造式で示されるビスマス複酸化物
の結晶格子中の「A」の位置を占めるBa。
<Example 2> Ba occupies the position "A" in the crystal lattice of the bismuth double oxide represented by the above-mentioned structural formula (1).

Sr、 Pbの各元素のアルコキシドと、rBJの位置
を占める Ti、 Nbの各元素のアルコキシドと、実
施例1で得られたビスマスエトキシドの3種のアルコキ
シドとを原子比が ■ Ba/ Bi/ Ti= 1 / 4 / 4■ 
Sr/旧/Ti=2/415 ■ Bi/ Nb/ Ti= 3 / 1 / 1■ 
Sr/ Nb/ Bi = 1 / 2 / 2■ P
b/ Nb/ Bi = 1 / 2 / 2となるよ
うに混合して、実施例1と同様に還流反応させ、加水分
解したところ、いずれの反応系にも実施例1と同様の白
色の沈殿物が生成した。この沈殿物を実施例1と同様に
加水分解液から分離、乾燥して5種類の粉体を得た。得
られた5種類の粉体を実施例1と同様に測定した結果を
第2表に示す。
The alkoxides of the elements Sr and Pb, the alkoxides of the elements Ti and Nb occupying the rBJ position, and the three alkoxides of bismuth ethoxide obtained in Example 1 were prepared in an atomic ratio of ■Ba/Bi/ Ti=1/4/4■
Sr/Old/Ti=2/415 ■Bi/Nb/Ti=3/1/1■
Sr/Nb/Bi = 1/2/2■P
When mixed so that b/Nb/Bi = 1/2/2 and subjected to reflux reaction and hydrolysis in the same manner as in Example 1, a white precipitate similar to that in Example 1 was found in both reaction systems. was generated. This precipitate was separated from the hydrolyzate and dried in the same manner as in Example 1 to obtain five types of powder. The five types of powder obtained were measured in the same manner as in Example 1, and the results are shown in Table 2.

第2表 この粉体を実施例1と同様に分析電子顕微鏡によって粒
径観察と組成分析を行った結果、いずれも粉体もバッチ
組成によく一致した均一な組成の微粒子であった。
Table 2 This powder was subjected to particle size observation and composition analysis using an analytical electron microscope in the same manner as in Example 1. As a result, all powders were found to be fine particles with a uniform composition that closely matched the batch composition.

特許出願人   三菱鉱業セメント株式会社代理人弁理
士  須 1)正 義(外2名)方 番 手り夕♀市正書(自発) 昭和59年10月27日 特許庁長官  志 賀   学 殿 ■、2ト件の表示 昭和59年 特 許願 第207171号2、発明の名
称   ビスマス複酸化物の製造方法3、補正をする者 =IN件との関係  特許出願人 住 所  東京都千代田区丸の内−丁目5番1号名 称
  三菱鉱業セメント株式会社 代表者  小  林  久  明 4、代理人 6、補正により増加する発明のa   な し8、!I
i止の内容 (1)明細書第7頁第4行目 「本発舅のよれば」を 「、へ発明によれば」と訂正する。
Patent applicant: Mitsubishi Mining and Cement Co., Ltd. Patent attorney, Su 1) Masayoshi (2 others), Kantenri Yu♀ Ichimasho (spontaneous) October 27, 1980 Commissioner of the Patent Office Manabu Shiga ■, 2 Indication of 1982 Patent Application No. 207171 2 Title of invention Method for producing bismuth double oxide 3 Person making amendment = Relationship with IN case Patent applicant address 5 Marunouchi-chome, Chiyoda-ku, Tokyo No. 1 Name Mitsubishi Mining Cement Co., Ltd. Representative Hisaaki Kobayashi 4, Agent 6, No increase in invention due to amendment 8,! I
Contents of the i-stop (1) On page 7, line 4 of the specification, ``According to the inventor'' is corrected to ``According to the invention.''

(2)明細ど第11頁第2表 (3)明細書第7頁第4行目〜回頁第3行目「いずれも
粉体も」を 「いずれの粉体も」と訂正する。
(2) Table 2 (3) on page 11 of the specification (3) From line 4 on page 7 to line 3 on page 3 of the specification, ``any powder'' is corrected to ``any powder.''

Claims (1)

【特許請求の範囲】 1)少なくともビスマスアルコキシドを含む2種以上の
アルコキシドを混合して反応させる混合反応工程と、 この反応生成物を加水分解する加水分解工程と、 この加水分解生成物を仮焼してビスマス複酸化物を得る
仮焼工程と を含むビスマス複酸化物の製造方法。 2)ビスマス複酸化物は、 (Bi_2O_2)^2^+(A_n_+_1B_nO
_3_n_+_1)^2^−(但し、AはBa、Sr、
Ca又はPb、Bはn=1のときMo又はW、n=2の
ときNb又はTa、n=3のときNb又はTi、n=4
、5又は8のときTi)の構造を有する特許請求の範囲
第1項に記載のビスマス複酸化物の製造方法。
[Claims] 1) A mixing reaction step of mixing and reacting two or more alkoxides including at least bismuth alkoxide, a hydrolysis step of hydrolyzing this reaction product, and calcination of this hydrolysis product. A method for producing bismuth double oxide, comprising: a calcination step to obtain bismuth double oxide. 2) Bismuth double oxide is (Bi_2O_2)^2^+(A_n_+_1B_nO
_3_n_+_1)^2^-(However, A is Ba, Sr,
Ca or Pb, B is Mo or W when n=1, Nb or Ta when n=2, Nb or Ti when n=3, n=4
, 5 or 8, the method for producing a bismuth composite oxide according to claim 1, having a structure of Ti).
JP20717184A 1984-10-04 1984-10-04 Preparation of compound bismuth oxide Pending JPS6186423A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20717184A JPS6186423A (en) 1984-10-04 1984-10-04 Preparation of compound bismuth oxide

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5811153A (en) * 1996-04-19 1998-09-22 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based dielectric thin films, and dielectric thin films and memories formed with said coating solutions, as well as processes for production thereof
US5972096A (en) * 1997-01-18 1999-10-26 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films
US6197102B1 (en) 1997-01-18 2001-03-06 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films, and ferroelectric thin films, ferroelectric capacitors and ferroelectric memories formed with said coating solutions, as well as processes for production thereof
WO2004083122A1 (en) * 2003-03-20 2004-09-30 Asahi Glass Company, Limited Method for producing bismuth titanate fine particle
CN102212878A (en) * 2011-05-27 2011-10-12 华东师范大学 Method for preparing acicular and fungiform Bi2O3 nano materials

Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS55140703A (en) * 1979-04-20 1980-11-04 Seiko Epson Corp Thin film element
JPS55140722A (en) * 1979-04-18 1980-11-04 Hitachi Metals Ltd Manufacture of ferrite fine grain powder
JPS57196704A (en) * 1981-05-18 1982-12-02 Westinghouse Electric Corp Manufacture of metallic hydroxide and oxide powder for forming ceramic
JPS5939724A (en) * 1982-08-27 1984-03-05 Matsushita Electric Ind Co Ltd Manufacture of dielectric powder for thick film

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55140722A (en) * 1979-04-18 1980-11-04 Hitachi Metals Ltd Manufacture of ferrite fine grain powder
JPS55140703A (en) * 1979-04-20 1980-11-04 Seiko Epson Corp Thin film element
JPS57196704A (en) * 1981-05-18 1982-12-02 Westinghouse Electric Corp Manufacture of metallic hydroxide and oxide powder for forming ceramic
JPS5939724A (en) * 1982-08-27 1984-03-05 Matsushita Electric Ind Co Ltd Manufacture of dielectric powder for thick film

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5811153A (en) * 1996-04-19 1998-09-22 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based dielectric thin films, and dielectric thin films and memories formed with said coating solutions, as well as processes for production thereof
US5972096A (en) * 1997-01-18 1999-10-26 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films
US6120912A (en) * 1997-01-18 2000-09-19 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films, and ferroelectric thin films, ferroelectric capacitors and ferroelectric memories formed with said coating solutions, as well as processes for production thereof
US6197102B1 (en) 1997-01-18 2001-03-06 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films, and ferroelectric thin films, ferroelectric capacitors and ferroelectric memories formed with said coating solutions, as well as processes for production thereof
US6303231B1 (en) 1997-01-18 2001-10-16 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films, and ferroelectric memories formed with said coating solutions, as well as processes for production thereof
US6528172B2 (en) 1997-01-18 2003-03-04 Tokyo Ohka Kogyo Co., Ltd. Coating solutions for use in forming bismuth-based ferroelectric thin films, and ferroelectric thin films, ferroelectric capacitors and ferroelectric memories formed with said coating solutions, as well as processes for production thereof
WO2004083122A1 (en) * 2003-03-20 2004-09-30 Asahi Glass Company, Limited Method for producing bismuth titanate fine particle
JPWO2004083122A1 (en) * 2003-03-20 2006-06-22 旭硝子株式会社 Method for producing bismuth titanate fine particles
US7300806B2 (en) 2003-03-20 2007-11-27 Asahi Glass Company, Limited Process for producing fine particles of bismuth titanate
JP4735257B2 (en) * 2003-03-20 2011-07-27 旭硝子株式会社 Method for producing bismuth titanate fine particles
KR101074311B1 (en) 2003-03-20 2011-10-17 아사히 가라스 가부시키가이샤 Method for producing bismuth titanate fine particle
CN102212878A (en) * 2011-05-27 2011-10-12 华东师范大学 Method for preparing acicular and fungiform Bi2O3 nano materials

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