JPS6185850U - - Google Patents

Info

Publication number
JPS6185850U
JPS6185850U JP1984170405U JP17040584U JPS6185850U JP S6185850 U JPS6185850 U JP S6185850U JP 1984170405 U JP1984170405 U JP 1984170405U JP 17040584 U JP17040584 U JP 17040584U JP S6185850 U JPS6185850 U JP S6185850U
Authority
JP
Japan
Prior art keywords
protection device
fixed frame
sintered body
utility
photomask protection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984170405U
Other languages
English (en)
Other versions
JPS638898Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984170405U priority Critical patent/JPS638898Y2/ja
Publication of JPS6185850U publication Critical patent/JPS6185850U/ja
Application granted granted Critical
Publication of JPS638898Y2 publication Critical patent/JPS638898Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１Ａ図乃至第１Ｂ図は本考案の実施例を示し
、第１Ａ図は斜視図、第１Ｂ図は正面断面図であ
る。第２Ａ図は従来技術の構成を示す正面断面図
、第２Ｂ図は前記従来技術の作用を説明する説明
図である。 １……フオトマスク、２……マスクパターン、
４，１０……固定枠、６，１１……薄膜、１２ａ
……焼結体。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) マスクパターンを囲設可能に形成した固定
    枠表面に透明超薄膜を貼着して形成したフオトマ
    スク保護装置において前記固定枠の一部又は全部
    を焼結体で形成した事を特徴とするフオトマスク
    保護装置。 (2) 各粒子間空隙間隔が１μｍ以下に緻密化さ
    れた焼結体を用いた実用新案登録請求の範囲第１
    項記載のフオトマスク保護装置。
JP1984170405U 1984-11-12 1984-11-12 Expired JPS638898Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984170405U JPS638898Y2 (ja) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984170405U JPS638898Y2 (ja) 1984-11-12 1984-11-12

Publications (2)

Publication Number Publication Date
JPS6185850U true JPS6185850U (ja) 1986-06-05
JPS638898Y2 JPS638898Y2 (ja) 1988-03-16

Family

ID=30728114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984170405U Expired JPS638898Y2 (ja) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS638898Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001005169A (ja) * 1999-06-24 2001-01-12 Shin Etsu Chem Co Ltd ペリクルおよびペリクルの製造方法
JP2004191986A (ja) * 2002-12-09 2004-07-08 Asml Holding Nv 多孔質フィルタ挿入体及び突出したボンディング面を備えたペリクルフレームのための方法及び装置
US7339653B2 (en) 2003-06-18 2008-03-04 Asml Holding N.V. System for a pellicle frame with heightened bonding surfaces

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001005169A (ja) * 1999-06-24 2001-01-12 Shin Etsu Chem Co Ltd ペリクルおよびペリクルの製造方法
JP2004191986A (ja) * 2002-12-09 2004-07-08 Asml Holding Nv 多孔質フィルタ挿入体及び突出したボンディング面を備えたペリクルフレームのための方法及び装置
US7339653B2 (en) 2003-06-18 2008-03-04 Asml Holding N.V. System for a pellicle frame with heightened bonding surfaces

Also Published As

Publication number Publication date
JPS638898Y2 (ja) 1988-03-16

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