JPS6185731U - - Google Patents
Info
- Publication number
- JPS6185731U JPS6185731U JP16921084U JP16921084U JPS6185731U JP S6185731 U JPS6185731 U JP S6185731U JP 16921084 U JP16921084 U JP 16921084U JP 16921084 U JP16921084 U JP 16921084U JP S6185731 U JPS6185731 U JP S6185731U
- Authority
- JP
- Japan
- Prior art keywords
- leaf spring
- parallel
- thin leaf
- leaf springs
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Specific Conveyance Elements (AREA)
- Springs (AREA)
Description
第１図は本考案の一実施例であるウエハ搬送装
置の側面図、第２図は第１図の平面図、第３図及
び第４図は従来例における動作を説明するための
模式図、第５図及び第６図は第１図における動作
を説明するための模式図を示す。
１ａ，１ｂ…ピンセツト、２ａ，２ｂ…開閉腕
、３ａ，３ｂ…薄板ばね、４ａ，４ｂ…押え板、
８…吸着溝、９…ウエハ、１０…固定腕、１１…
搬送機構、１２…プリアライメントステージ、１
３…露光ステージ。
FIG. 1 is a side view of a wafer transfer device that is an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIGS. 3 and 4 are schematic diagrams for explaining the operation in a conventional example. 5 and 6 show schematic diagrams for explaining the operation in FIG. 1. 1a, 1b...tweezers, 2a, 2b...opening/closing arms, 3a, 3b...thin leaf springs, 4a, 4b...pressing plates,
8... Suction groove, 9... Wafer, 10... Fixed arm, 11...
Conveyance mechanism, 12... Pre-alignment stage, 1
3...Exposure stage.
Claims (1)
を固定側とし、他端を移動側として構成したいわ
ゆる平行板ばね機構において、前記薄板ばねの少
なくとも一枚を挾むように一方は固定側、他方は
移動側に片持的に固定された部材を設け、前記薄
板ばねを挾む方向の外力に対しては剛に、逆方向
の外力に対しては平行板ばね本来の柔になるべく
剛性に方向性を持たしめたことを特徴とする平行
板ばね機構。 In a so-called parallel leaf spring mechanism, in which one end of a plurality of thin leaf springs arranged in parallel at a distance is configured as a fixed side and the other end as a moving side, one of the thin leaf springs is arranged so as to sandwich at least one of the thin leaf springs, one of which is a fixed side and the other is a movable side. A member fixed in a cantilever manner on the moving side is provided, and is made rigid against an external force in the direction that pinches the thin leaf spring, and is made as rigid as possible in response to an external force in the opposite direction, as is the original flexibility of a parallel leaf spring. A parallel leaf spring mechanism characterized by having
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16921084U JPS6185731U (en) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16921084U JPS6185731U (en) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185731U true JPS6185731U (en) | 1986-06-05 |
Family
ID=30726957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16921084U Pending JPS6185731U (en) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185731U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017148896A (en) * | 2016-02-24 | 2017-08-31 | 株式会社Ｋｅｃ | Robot arm and robot |
-
1984
- 1984-11-09 JP JP16921084U patent/JPS6185731U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017148896A (en) * | 2016-02-24 | 2017-08-31 | 株式会社Ｋｅｃ | Robot arm and robot |
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