JPS6185143U - - Google Patents
Info
- Publication number
- JPS6185143U JPS6185143U JP16852784U JP16852784U JPS6185143U JP S6185143 U JPS6185143 U JP S6185143U JP 16852784 U JP16852784 U JP 16852784U JP 16852784 U JP16852784 U JP 16852784U JP S6185143 U JPS6185143 U JP S6185143U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- negative pressure
- sealing part
- cover
- membrane manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16852784U JPH0526735Y2 (OSRAM) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16852784U JPH0526735Y2 (OSRAM) | 1984-11-08 | 1984-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6185143U true JPS6185143U (OSRAM) | 1986-06-04 |
| JPH0526735Y2 JPH0526735Y2 (OSRAM) | 1993-07-07 |
Family
ID=30726295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16852784U Expired - Lifetime JPH0526735Y2 (OSRAM) | 1984-11-08 | 1984-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526735Y2 (OSRAM) |
-
1984
- 1984-11-08 JP JP16852784U patent/JPH0526735Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526735Y2 (OSRAM) | 1993-07-07 |