JPS6185142U - - Google Patents

Info

Publication number
JPS6185142U
JPS6185142U JP16853484U JP16853484U JPS6185142U JP S6185142 U JPS6185142 U JP S6185142U JP 16853484 U JP16853484 U JP 16853484U JP 16853484 U JP16853484 U JP 16853484U JP S6185142 U JPS6185142 U JP S6185142U
Authority
JP
Japan
Prior art keywords
rotating
rotating shaft
rotating frame
plate
peripheral surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16853484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16853484U priority Critical patent/JPS6185142U/ja
Publication of JPS6185142U publication Critical patent/JPS6185142U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16853484U 1984-11-08 1984-11-08 Pending JPS6185142U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16853484U JPS6185142U (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16853484U JPS6185142U (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Publications (1)

Publication Number Publication Date
JPS6185142U true JPS6185142U (enrdf_load_stackoverflow) 1986-06-04

Family

ID=30726302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16853484U Pending JPS6185142U (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Country Status (1)

Country Link
JP (1) JPS6185142U (enrdf_load_stackoverflow)

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