JPS6185056U - - Google Patents
Info
- Publication number
- JPS6185056U JPS6185056U JP16920484U JP16920484U JPS6185056U JP S6185056 U JPS6185056 U JP S6185056U JP 16920484 U JP16920484 U JP 16920484U JP 16920484 U JP16920484 U JP 16920484U JP S6185056 U JPS6185056 U JP S6185056U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stage
- cylindrical body
- side entry
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011109 contamination Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16920484U JPS6185056U (enExample) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16920484U JPS6185056U (enExample) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185056U true JPS6185056U (enExample) | 1986-06-04 |
Family
ID=30726951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16920484U Pending JPS6185056U (enExample) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185056U (enExample) |
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1984
- 1984-11-09 JP JP16920484U patent/JPS6185056U/ja active Pending