JPS6184510U - - Google Patents
Info
- Publication number
- JPS6184510U JPS6184510U JP16794584U JP16794584U JPS6184510U JP S6184510 U JPS6184510 U JP S6184510U JP 16794584 U JP16794584 U JP 16794584U JP 16794584 U JP16794584 U JP 16794584U JP S6184510 U JPS6184510 U JP S6184510U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- photodiodes
- critical angle
- angle prism
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
第１図は接触式の微細形状測定器の１例を示す
略縦断側面図、第２図は光学式の変位検出器の原
理を示す略側面図、第３図は臨界角プリズムの原
理を示す略側面図、第４図は臨界角プリズムによ
り生じる電位差と変位量との関係を示す線図、第
５図は光学式変位検出器の変形例を示す略側面図
、第６図は被測定面を拡大して示す斜視図、第７
図は被測定面上の溝により生じる干渉縞を示す図
、第８〜９図はこの干渉縞の方向に対応してフオ
トダイオードを配列する方向の２例を示しており
、第９図は本考案の場合を示す図である。
１：被測定面、２：触針、３：鉄芯、４：コイ
ル、５，６：ばね、７：レーザダイオード、８：
コリメータレンズ、９：偏光ビームスプリツタ、
１０：４分の１波長板、１１：対物レンズ、１２
：ハーフミラー、１３：第一の臨界角プリズム、
１４：第一のフオトダイオード、１５：第二の臨
界角プリズム、１６：第二のフオトダイオード、
１７：溝、１８：干渉縞。
Figure 1 is a schematic vertical side view showing an example of a contact-type micro-shape measuring instrument, Figure 2 is a schematic side view showing the principle of an optical displacement detector, and Figure 3 is a diagram showing the principle of a critical angle prism. A schematic side view, Fig. 4 is a diagram showing the relationship between the potential difference generated by the critical angle prism and the amount of displacement, Fig. 5 is a schematic side view showing a modification of the optical displacement detector, and Fig. 6 is a diagram showing the surface to be measured. 7th perspective view showing an enlarged view of
The figure shows interference fringes caused by grooves on the surface to be measured, and Figures 8 and 9 show two examples of directions in which photodiodes are arranged corresponding to the direction of these interference fringes. It is a figure which shows the case of an invention. 1: Surface to be measured, 2: Stylus, 3: Iron core, 4: Coil, 5, 6: Spring, 7: Laser diode, 8:
Collimator lens, 9: Polarizing beam splitter,
10: Quarter wavelength plate, 11: Objective lens, 12
: Half mirror, 13: First critical angle prism,
14: first photodiode, 15: second critical angle prism, 16: second photodiode,
17: Groove, 18: Interference fringe.
Claims (1)
を介して第一、第二のフオトダイオードに入れ、
両フオトダイオードに達するレーザ光の強度差に
より被測定面からの距離を求める微細形状測定器
に於いて、第一、第二のフオトダイオードの配列
方向と直角な方向に被測定物を移動自在としたこ
とを特徴とする微細形状測定器。 The laser beam reflected from the surface to be measured is passed through a critical angle prism into the first and second photodiodes,
In microform measuring instruments that measure the distance from the surface to be measured based on the difference in intensity between the laser beams that reach both photodiodes, the object to be measured can be moved in a direction perpendicular to the direction in which the first and second photodiodes are arranged. A micro-shape measuring instrument characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984167945U JPH044966Y2 (en) | 1984-11-07 | 1984-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984167945U JPH044966Y2 (en) | 1984-11-07 | 1984-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184510U true JPS6184510U (en) | 1986-06-04 |
| JPH044966Y2 JPH044966Y2 (en) | 1992-02-13 |
Family
ID=30725729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984167945U Expired JPH044966Y2 (en) | 1984-11-07 | 1984-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044966Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379003A (en) * | 1986-09-22 | 1988-04-09 | Mitsutoyo Corp | Light probe for measuring shape |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990007A (en) * | 1982-11-16 | 1984-05-24 | Olympus Optical Co Ltd | Optical size measuring device |
-
1984
- 1984-11-07 JP JP1984167945U patent/JPH044966Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990007A (en) * | 1982-11-16 | 1984-05-24 | Olympus Optical Co Ltd | Optical size measuring device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379003A (en) * | 1986-09-22 | 1988-04-09 | Mitsutoyo Corp | Light probe for measuring shape |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044966Y2 (en) | 1992-02-13 |
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