JPS6184506A - 光路長測定装置 - Google Patents

光路長測定装置

Info

Publication number
JPS6184506A
JPS6184506A JP59206415A JP20641584A JPS6184506A JP S6184506 A JPS6184506 A JP S6184506A JP 59206415 A JP59206415 A JP 59206415A JP 20641584 A JP20641584 A JP 20641584A JP S6184506 A JPS6184506 A JP S6184506A
Authority
JP
Japan
Prior art keywords
optical path
optical system
path length
light beam
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59206415A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453242B2 (enrdf_load_stackoverflow
Inventor
Minokichi Ban
箕吉 伴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59206415A priority Critical patent/JPS6184506A/ja
Publication of JPS6184506A publication Critical patent/JPS6184506A/ja
Publication of JPH0453242B2 publication Critical patent/JPH0453242B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP59206415A 1984-10-03 1984-10-03 光路長測定装置 Granted JPS6184506A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59206415A JPS6184506A (ja) 1984-10-03 1984-10-03 光路長測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59206415A JPS6184506A (ja) 1984-10-03 1984-10-03 光路長測定装置

Publications (2)

Publication Number Publication Date
JPS6184506A true JPS6184506A (ja) 1986-04-30
JPH0453242B2 JPH0453242B2 (enrdf_load_stackoverflow) 1992-08-26

Family

ID=16522986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59206415A Granted JPS6184506A (ja) 1984-10-03 1984-10-03 光路長測定装置

Country Status (1)

Country Link
JP (1) JPS6184506A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194125A (ja) * 1992-10-05 1994-07-15 Carl Zeiss:Fa 対物レンズの焦点から物体のずれ又は位置変化を検出する方法及び装置
JP2009069038A (ja) * 2007-09-14 2009-04-02 Canon Inc 絶対位置の計測装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194125A (ja) * 1992-10-05 1994-07-15 Carl Zeiss:Fa 対物レンズの焦点から物体のずれ又は位置変化を検出する方法及び装置
JP2009069038A (ja) * 2007-09-14 2009-04-02 Canon Inc 絶対位置の計測装置

Also Published As

Publication number Publication date
JPH0453242B2 (enrdf_load_stackoverflow) 1992-08-26

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