JPS6184500U - - Google Patents
Info
- Publication number
- JPS6184500U JPS6184500U JP16887384U JP16887384U JPS6184500U JP S6184500 U JPS6184500 U JP S6184500U JP 16887384 U JP16887384 U JP 16887384U JP 16887384 U JP16887384 U JP 16887384U JP S6184500 U JPS6184500 U JP S6184500U
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- heat insulating
- lead terminal
- heating means
- treatment tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000005485 electric heating Methods 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984168873U JPH0120640Y2 (US20110009641A1-20110113-C00116.png) | 1984-11-07 | 1984-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984168873U JPH0120640Y2 (US20110009641A1-20110113-C00116.png) | 1984-11-07 | 1984-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184500U true JPS6184500U (US20110009641A1-20110113-C00116.png) | 1986-06-03 |
| JPH0120640Y2 JPH0120640Y2 (US20110009641A1-20110113-C00116.png) | 1989-06-21 |
Family
ID=30726634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984168873U Expired JPH0120640Y2 (US20110009641A1-20110113-C00116.png) | 1984-11-07 | 1984-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0120640Y2 (US20110009641A1-20110113-C00116.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01110724A (ja) * | 1987-07-31 | 1989-04-27 | Tokyo Electron Ltd | 加熱炉 |
| JP2008288051A (ja) * | 2007-05-18 | 2008-11-27 | Nissan Motor Co Ltd | 燃料電池スタック用断熱容器及び燃料電池装置 |
| JP2012089557A (ja) * | 2010-10-15 | 2012-05-10 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
| JP2013098227A (ja) * | 2011-10-28 | 2013-05-20 | Toshiba Corp | 超伝導コイルの加熱処理装置及び加熱処理方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007110163A (ja) * | 2007-01-10 | 2007-04-26 | Hitachi Kokusai Electric Inc | 半導体製造装置及び熱処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54174041U (US20110009641A1-20110113-C00116.png) * | 1978-05-29 | 1979-12-08 |
-
1984
- 1984-11-07 JP JP1984168873U patent/JPH0120640Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54174041U (US20110009641A1-20110113-C00116.png) * | 1978-05-29 | 1979-12-08 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01110724A (ja) * | 1987-07-31 | 1989-04-27 | Tokyo Electron Ltd | 加熱炉 |
| JP2008288051A (ja) * | 2007-05-18 | 2008-11-27 | Nissan Motor Co Ltd | 燃料電池スタック用断熱容器及び燃料電池装置 |
| JP2012089557A (ja) * | 2010-10-15 | 2012-05-10 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
| JP2013098227A (ja) * | 2011-10-28 | 2013-05-20 | Toshiba Corp | 超伝導コイルの加熱処理装置及び加熱処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0120640Y2 (US20110009641A1-20110113-C00116.png) | 1989-06-21 |
