JPS6181858U - - Google Patents
Info
- Publication number
- JPS6181858U JPS6181858U JP16692084U JP16692084U JPS6181858U JP S6181858 U JPS6181858 U JP S6181858U JP 16692084 U JP16692084 U JP 16692084U JP 16692084 U JP16692084 U JP 16692084U JP S6181858 U JPS6181858 U JP S6181858U
- Authority
- JP
- Japan
- Prior art keywords
- polishing device
- airtight chamber
- support
- pressing
- pressing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16692084U JPS6181858U (cs) | 1984-11-01 | 1984-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16692084U JPS6181858U (cs) | 1984-11-01 | 1984-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6181858U true JPS6181858U (cs) | 1986-05-30 |
Family
ID=30724727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16692084U Pending JPS6181858U (cs) | 1984-11-01 | 1984-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6181858U (cs) |
-
1984
- 1984-11-01 JP JP16692084U patent/JPS6181858U/ja active Pending