JPS6180354U - - Google Patents

Info

Publication number
JPS6180354U
JPS6180354U JP16391084U JP16391084U JPS6180354U JP S6180354 U JPS6180354 U JP S6180354U JP 16391084 U JP16391084 U JP 16391084U JP 16391084 U JP16391084 U JP 16391084U JP S6180354 U JPS6180354 U JP S6180354U
Authority
JP
Japan
Prior art keywords
diaphragm
layer
passage
diaphragm valve
closes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16391084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332772Y2 (US06373033-20020416-M00071.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984163910U priority Critical patent/JPH0332772Y2/ja
Publication of JPS6180354U publication Critical patent/JPS6180354U/ja
Application granted granted Critical
Publication of JPH0332772Y2 publication Critical patent/JPH0332772Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exhaust-Gas Circulating Devices (AREA)
  • Fluid-Driven Valves (AREA)
JP1984163910U 1984-10-31 1984-10-31 Expired JPH0332772Y2 (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984163910U JPH0332772Y2 (US06373033-20020416-M00071.png) 1984-10-31 1984-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984163910U JPH0332772Y2 (US06373033-20020416-M00071.png) 1984-10-31 1984-10-31

Publications (2)

Publication Number Publication Date
JPS6180354U true JPS6180354U (US06373033-20020416-M00071.png) 1986-05-28
JPH0332772Y2 JPH0332772Y2 (US06373033-20020416-M00071.png) 1991-07-11

Family

ID=30721772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984163910U Expired JPH0332772Y2 (US06373033-20020416-M00071.png) 1984-10-31 1984-10-31

Country Status (1)

Country Link
JP (1) JPH0332772Y2 (US06373033-20020416-M00071.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0463960A (ja) * 1990-07-03 1992-02-28 Hino Motors Ltd 水冷式egrバルブを用いた排ガス再循環装置
WO2022060561A1 (en) * 2020-09-15 2022-03-24 Lam Research Corporation Heat-transferring valve flexure and methods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109022A (en) * 1977-03-07 1978-09-22 Hitachi Ltd Exhaust gas re-cycling valve
JPS59115849U (ja) * 1983-01-26 1984-08-04 三菱電機株式会社 排ガス制御バルブ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109022A (en) * 1977-03-07 1978-09-22 Hitachi Ltd Exhaust gas re-cycling valve
JPS59115849U (ja) * 1983-01-26 1984-08-04 三菱電機株式会社 排ガス制御バルブ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0463960A (ja) * 1990-07-03 1992-02-28 Hino Motors Ltd 水冷式egrバルブを用いた排ガス再循環装置
WO2022060561A1 (en) * 2020-09-15 2022-03-24 Lam Research Corporation Heat-transferring valve flexure and methods

Also Published As

Publication number Publication date
JPH0332772Y2 (US06373033-20020416-M00071.png) 1991-07-11

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