JPS6180038A - Organic polymer humidity sensor - Google Patents

Organic polymer humidity sensor

Info

Publication number
JPS6180038A
JPS6180038A JP20163584A JP20163584A JPS6180038A JP S6180038 A JPS6180038 A JP S6180038A JP 20163584 A JP20163584 A JP 20163584A JP 20163584 A JP20163584 A JP 20163584A JP S6180038 A JPS6180038 A JP S6180038A
Authority
JP
Japan
Prior art keywords
protective film
main body
end part
humidity sensor
inverted state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20163584A
Other languages
Japanese (ja)
Other versions
JPH0665983B2 (en
Inventor
Miyakichi Kameda
亀田 宮吉
Teruo Tsunoda
角田 照夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20163584A priority Critical patent/JPH0665983B2/en
Publication of JPS6180038A publication Critical patent/JPS6180038A/en
Publication of JPH0665983B2 publication Critical patent/JPH0665983B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To prevent the generation of a crack by the buffering action of a protective film, by increasing the thickness of the protective film provided to the upper end surface of a substrate and in the vicinity thereof. CONSTITUTION:In usual work, a sensor main body 1 coated with a silicone resin by immersion is attracted and fixed to the part of the rubber magnet 8 of a drying jig 7 through a lead wire and allowed to stand for about 16min at room temp. in an inverted state. Next, said sensor main body is set up and dried at 110 deg.C for 2hr. In order to increase the film thickness at the end part (a) of the sensor main body 1, standing at room temp. in an inverted state is extended to 1hr and, after curing advanced to a certain degree, said main body is reversed to be subjected to final drying at 110 deg.C for 2hr. As mentioned above, by extending a natural standing time in an inverted state, a protective film 6 can be applied to the end part 1a in a sufficient thickness. By this method, the hydroscopic speed at the leading end part becomes slow and the elongation of a humidity-sensitive film becomes small and the crack generated at the leading end part is reduced to a large extent.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明はルームエアコンその他の家電品に使つ有機高分
子湿度センサに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an organic polymer humidity sensor used in room air conditioners and other home appliances.

〔発明の背景〕[Background of the invention]

従来の湿度センサは特開昭50−20781号に記載の
ように湿度センサは、ガラス基板上に塩素原子を有する
有機重合体とポリアミド樹脂を反応させた感湿樹脂を塗
布し、その上に保護膜を被覆することにより、はこりや
亜硫酸ガスなどを含む汚染雰囲気による影響か著るしく
軽減されるとしている。しかしセンサの長期安定性やク
ラック発生元々については何等ふれてない。
Conventional humidity sensors, as described in JP-A No. 50-20781, are made by coating a glass substrate with a moisture-sensitive resin made by reacting an organic polymer with chlorine atoms with a polyamide resin, and then applying a protective coating on top of the moisture-sensitive resin. The company claims that by coating the product with a membrane, the effects of a contaminated atmosphere containing dust and sulfur dioxide gas can be significantly reduced. However, there is no mention of the sensor's long-term stability or the origin of cracks.

〔発明の目的〕[Purpose of the invention]

本発明の目的は湿度センサの感湿部に発生するクラック
を防止するために、通常の保護膜塗布作業によれば基板
上部端面では膜厚が薄くなりがちであるものを、作業条
件を適正に定めることにより、より膜厚を厚くしてその
緩衝作用によりクラックの発生を防止するものである。
The purpose of the present invention is to prevent cracks from occurring in the humidity sensitive part of a humidity sensor by adjusting the working conditions to prevent the film from forming on the upper edge of the substrate, which tends to be thinner in the normal protective film application process. By setting the thickness, the film thickness can be made thicker, and the occurrence of cracks can be prevented by its buffering effect.

〔発明の概要〕[Summary of the invention]

すなわち、従来はシリコン樹脂保護膜か基板に均一な厚
さになるよう樹脂液浸漬後、流動性が残っているうちに
基板を逆さにする等して全体に広げるようにしていた。
That is, conventionally, after a silicone resin protective film is immersed in a resin solution to obtain a uniform thickness on a substrate, the substrate is turned upside down while the silicone resin protective film is still fluid to spread it over the entire surface.

しかしこれでは端面部か薄(なるので、これを改めるた
めまず上部端面を下にして、この状態で半乾燥しその後
向きを変えて本格的に加熱硬化させるようにして端部も
十分樹脂が被うようにした。
However, with this, the end surface becomes thin (so, in order to correct this, first place the upper end face down, semi-dry it in this state, then change the orientation and fully heat cure it to make sure that the end part is fully covered with resin. I tried to do so.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の実施例を第1図〜第4図に基いて説明する
。1は湿度センサ本体であるが、セラミック基板2に金
と鉛ガラスから成る電極を焼成した上1こ感湿膜5を塗
布しさら艮シリコン樹脂の保護膜6を形成して完成する
。保護膜のシリコン樹脂は付加型二液タイプを使用し、
等鉦ずつ混合した後、直ちに浸漬塗布するよう番こする
Embodiments of the present invention will be described below with reference to FIGS. 1 to 4. Reference numeral 1 denotes the humidity sensor body, which is completed by coating a ceramic substrate 2 with electrodes made of gold and lead glass by firing, applying a moisture-sensitive film 5, and then forming a protective film 6 of silicone resin. The silicone resin of the protective film uses an additive two-component type.
After mixing in equal proportions, strain for immediate dip application.

通常の作業においてはシリコン樹脂を浸漬塗布したセン
サ本体1は乾燥用治具7のゴムマグネット8の部分にリ
ードを吸引固定し、逆さの状態で室温で約15分間放置
する。次にこれを起こして110℃で2時間乾燥する。
In normal operation, the sensor body 1 coated with silicone resin is suctioned and fixed to the rubber magnet 8 of the drying jig 7, and is left upside down at room temperature for about 15 minutes. Next, it is raised and dried at 110° C. for 2 hours.

今回の端部の膜厚を厚くするための改良法では、逆さで
の室温放置を1時間に延長し、ある程度硬化か進んだ後
、反転して110℃で2時間の本乾燥番こ入るようにす
る。
In this improved method to thicken the film at the edges, we left it upside down at room temperature for 1 hour, and after it had cured to some extent, we turned it over and put it in the main drying stage at 110℃ for 2 hours. Make it.

〔発明の効果〕〔Effect of the invention〕

本発明によれば逆さ状態での自然放置の時間を延ばした
こと番こより、従来のものの保護膜か端部で薄くなる傾
向にあったものか、十分厚(塗布することか可能となっ
た。この結果、先端部の吸湿速度が遅(なり、感湿膜の
伸びか小さくなって従来センサの先端部艮多く発生した
クラックは、本発明によって大幅に減少し、センサの信
頼性向上に寄与する効果が大である。
According to the present invention, since the time of natural standing in an inverted state is extended, it is now possible to apply a sufficiently thick protective film, unlike the conventional protective film, which tends to become thinner at the edges. As a result, the rate of moisture absorption at the tip becomes slow (and the elongation of the moisture-sensitive film becomes small), and the cracks that often occur at the tip of conventional sensors are significantly reduced by the present invention, contributing to improved sensor reliability. The effect is great.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は湿度センサの正面図、第2図は第1図の側断面
図、第3図は本発明によって作製した湿度センサの側面
図である。第4図は保護膜乾燥用治具の外観図である。 1・・・湿度センサ本体、2・・・セラミック基板、3
・・・(し形電極、4・・・リード線、5・・・感湿膜
、6・・・保護膜、7・・・乾燥用治具、8・・・ゴム
マグネット。
FIG. 1 is a front view of the humidity sensor, FIG. 2 is a side sectional view of FIG. 1, and FIG. 3 is a side view of the humidity sensor manufactured according to the present invention. FIG. 4 is an external view of the protective film drying jig. 1... Humidity sensor body, 2... Ceramic substrate, 3
... (Rhibson shaped electrode, 4... Lead wire, 5... Moisture sensitive membrane, 6... Protective film, 7... Drying jig, 8... Rubber magnet.

Claims (2)

【特許請求の範囲】[Claims] 1.セラミック基板に形成したくし形電極の上面に有機
高分子から成る感湿膜とその上にシリコン樹脂の保護膜
とで被った湿度センサにおいて、基板上部端面とその近
傍の保護膜を厚くしたことを特徴とする有機高分子湿度
センサ。
1. In a humidity sensor in which the top surface of a comb-shaped electrode formed on a ceramic substrate is covered with a moisture-sensitive film made of an organic polymer and a protective film made of silicone resin, we have developed a technology that increases the thickness of the protective film on the top edge of the substrate and its vicinity. Characteristic organic polymer humidity sensor.
2.前記保護膜をシリコン樹脂に浸漬し、基板上端部を
下にして常温放置により半乾燥し、反転して加熱乾燥す
ることを特徴とする特許請求の範囲第1項記載の有機高
分子湿度センサ。
2. 2. The organic polymer humidity sensor according to claim 1, wherein the protective film is immersed in silicone resin, left to semi-dry at room temperature with the upper end of the substrate facing down, and then turned over and heated to dry.
JP20163584A 1984-09-28 1984-09-28 Organic polymer humidity sensor Expired - Lifetime JPH0665983B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20163584A JPH0665983B2 (en) 1984-09-28 1984-09-28 Organic polymer humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20163584A JPH0665983B2 (en) 1984-09-28 1984-09-28 Organic polymer humidity sensor

Publications (2)

Publication Number Publication Date
JPS6180038A true JPS6180038A (en) 1986-04-23
JPH0665983B2 JPH0665983B2 (en) 1994-08-24

Family

ID=16444344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20163584A Expired - Lifetime JPH0665983B2 (en) 1984-09-28 1984-09-28 Organic polymer humidity sensor

Country Status (1)

Country Link
JP (1) JPH0665983B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148953A (en) * 1987-12-04 1989-06-12 Nok Corp Nitrogen oxide detecting element
WO2001046708A1 (en) * 1999-12-22 2001-06-28 Mitsubichi Denki Kabushiki Kaisha Sensor device and method of manufacture thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148953A (en) * 1987-12-04 1989-06-12 Nok Corp Nitrogen oxide detecting element
WO2001046708A1 (en) * 1999-12-22 2001-06-28 Mitsubichi Denki Kabushiki Kaisha Sensor device and method of manufacture thereof
US6703132B1 (en) 1999-12-22 2004-03-09 Mitsubishi Denki Kabushiki Kaisha Magnetoresistance sensor element and method of fabricating the magnetoresistance element

Also Published As

Publication number Publication date
JPH0665983B2 (en) 1994-08-24

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