JPS6179535U - - Google Patents
Info
- Publication number
- JPS6179535U JPS6179535U JP16430384U JP16430384U JPS6179535U JP S6179535 U JPS6179535 U JP S6179535U JP 16430384 U JP16430384 U JP 16430384U JP 16430384 U JP16430384 U JP 16430384U JP S6179535 U JPS6179535 U JP S6179535U
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- carrier
- semiconductor material
- wall portion
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984164303U JPH0452993Y2 (hu) | 1984-10-30 | 1984-10-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984164303U JPH0452993Y2 (hu) | 1984-10-30 | 1984-10-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6179535U true JPS6179535U (hu) | 1986-05-27 |
JPH0452993Y2 JPH0452993Y2 (hu) | 1992-12-14 |
Family
ID=30722166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984164303U Expired JPH0452993Y2 (hu) | 1984-10-30 | 1984-10-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0452993Y2 (hu) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013135127A (ja) * | 2011-12-27 | 2013-07-08 | Shindengen Electric Mfg Co Ltd | クレイドル、半導体ウェーハの水切り方法及び半導体装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5660596A (en) * | 1979-10-23 | 1981-05-25 | Mitsubishi Electric Corp | Centrifugal hydroextractor |
JPS5954925U (ja) * | 1982-10-01 | 1984-04-10 | 東邦化成株式会社 | ウエ−ハ用回転乾燥装置 |
-
1984
- 1984-10-30 JP JP1984164303U patent/JPH0452993Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5660596A (en) * | 1979-10-23 | 1981-05-25 | Mitsubishi Electric Corp | Centrifugal hydroextractor |
JPS5954925U (ja) * | 1982-10-01 | 1984-04-10 | 東邦化成株式会社 | ウエ−ハ用回転乾燥装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013135127A (ja) * | 2011-12-27 | 2013-07-08 | Shindengen Electric Mfg Co Ltd | クレイドル、半導体ウェーハの水切り方法及び半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0452993Y2 (hu) | 1992-12-14 |
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