JPS6178869U - - Google Patents
Info
- Publication number
- JPS6178869U JPS6178869U JP16145284U JP16145284U JPS6178869U JP S6178869 U JPS6178869 U JP S6178869U JP 16145284 U JP16145284 U JP 16145284U JP 16145284 U JP16145284 U JP 16145284U JP S6178869 U JPS6178869 U JP S6178869U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- semiconductor wafer
- liquid blowing
- blowing part
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 3
- 230000005684 electric field Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Chemical Treatment Of Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16145284U JPS6178869U (en, 2012) | 1984-10-25 | 1984-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16145284U JPS6178869U (en, 2012) | 1984-10-25 | 1984-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178869U true JPS6178869U (en, 2012) | 1986-05-26 |
Family
ID=30719361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16145284U Pending JPS6178869U (en, 2012) | 1984-10-25 | 1984-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178869U (en, 2012) |
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1984
- 1984-10-25 JP JP16145284U patent/JPS6178869U/ja active Pending