JPS6178863U - - Google Patents

Info

Publication number
JPS6178863U
JPS6178863U JP16088184U JP16088184U JPS6178863U JP S6178863 U JPS6178863 U JP S6178863U JP 16088184 U JP16088184 U JP 16088184U JP 16088184 U JP16088184 U JP 16088184U JP S6178863 U JPS6178863 U JP S6178863U
Authority
JP
Japan
Prior art keywords
partition
gap
divided
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16088184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16088184U priority Critical patent/JPS6178863U/ja
Publication of JPS6178863U publication Critical patent/JPS6178863U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP16088184U 1984-10-24 1984-10-24 Pending JPS6178863U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16088184U JPS6178863U (enrdf_load_stackoverflow) 1984-10-24 1984-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16088184U JPS6178863U (enrdf_load_stackoverflow) 1984-10-24 1984-10-24

Publications (1)

Publication Number Publication Date
JPS6178863U true JPS6178863U (enrdf_load_stackoverflow) 1986-05-26

Family

ID=30718794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16088184U Pending JPS6178863U (enrdf_load_stackoverflow) 1984-10-24 1984-10-24

Country Status (1)

Country Link
JP (1) JPS6178863U (enrdf_load_stackoverflow)

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