JPS6178863U - - Google Patents
Info
- Publication number
- JPS6178863U JPS6178863U JP16088184U JP16088184U JPS6178863U JP S6178863 U JPS6178863 U JP S6178863U JP 16088184 U JP16088184 U JP 16088184U JP 16088184 U JP16088184 U JP 16088184U JP S6178863 U JPS6178863 U JP S6178863U
- Authority
- JP
- Japan
- Prior art keywords
- partition
- gap
- divided
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す透視図であつ
て、１はソースボート、２は間仕切りである。
FIG. 1 is a perspective view showing an embodiment of the present invention, where 1 is a source boat and 2 is a partition.
Claims (1)
間仕切りと底部との間にすき間を有する事を特徴
とする気相成長用ソースボート。 A source boat for vapor phase growth characterized by being divided into several small chambers by a partition and having a gap between the partition and the bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16088184U JPS6178863U (en) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16088184U JPS6178863U (en) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178863U true JPS6178863U (en) | 1986-05-26 |
Family
ID=30718794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16088184U Pending JPS6178863U (en) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178863U (en) |
-
1984
- 1984-10-24 JP JP16088184U patent/JPS6178863U/ja active Pending