JPS6178596U - - Google Patents
Info
- Publication number
- JPS6178596U JPS6178596U JP16473184U JP16473184U JPS6178596U JP S6178596 U JPS6178596 U JP S6178596U JP 16473184 U JP16473184 U JP 16473184U JP 16473184 U JP16473184 U JP 16473184U JP S6178596 U JPS6178596 U JP S6178596U
- Authority
- JP
- Japan
- Prior art keywords
- base
- suction pad
- suction
- outer peripheral
- air passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473184U JPS6178596U (ko) | 1984-10-31 | 1984-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473184U JPS6178596U (ko) | 1984-10-31 | 1984-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178596U true JPS6178596U (ko) | 1986-05-26 |
Family
ID=30722595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16473184U Pending JPS6178596U (ko) | 1984-10-31 | 1984-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178596U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645752A (en) * | 1987-06-30 | 1989-01-10 | Tokyo Electron Ltd | Suction arm |
-
1984
- 1984-10-31 JP JP16473184U patent/JPS6178596U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645752A (en) * | 1987-06-30 | 1989-01-10 | Tokyo Electron Ltd | Suction arm |