JPS6178287U - - Google Patents

Info

Publication number
JPS6178287U
JPS6178287U JP16442284U JP16442284U JPS6178287U JP S6178287 U JPS6178287 U JP S6178287U JP 16442284 U JP16442284 U JP 16442284U JP 16442284 U JP16442284 U JP 16442284U JP S6178287 U JPS6178287 U JP S6178287U
Authority
JP
Japan
Prior art keywords
suction
discharge
ports
pump
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16442284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16442284U priority Critical patent/JPS6178287U/ja
Publication of JPS6178287U publication Critical patent/JPS6178287U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP16442284U 1984-10-29 1984-10-29 Pending JPS6178287U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16442284U JPS6178287U (zh) 1984-10-29 1984-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16442284U JPS6178287U (zh) 1984-10-29 1984-10-29

Publications (1)

Publication Number Publication Date
JPS6178287U true JPS6178287U (zh) 1986-05-26

Family

ID=30722283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16442284U Pending JPS6178287U (zh) 1984-10-29 1984-10-29

Country Status (1)

Country Link
JP (1) JPS6178287U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014037799A (ja) * 2012-08-16 2014-02-27 Ulvac Japan Ltd 往復動式ポンプ
US20220056900A1 (en) * 2019-06-27 2022-02-24 Murata Manufacturing Co., Ltd. Pump device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014037799A (ja) * 2012-08-16 2014-02-27 Ulvac Japan Ltd 往復動式ポンプ
US20220056900A1 (en) * 2019-06-27 2022-02-24 Murata Manufacturing Co., Ltd. Pump device

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