JPS6178287U - - Google Patents
Info
- Publication number
- JPS6178287U JPS6178287U JP16442284U JP16442284U JPS6178287U JP S6178287 U JPS6178287 U JP S6178287U JP 16442284 U JP16442284 U JP 16442284U JP 16442284 U JP16442284 U JP 16442284U JP S6178287 U JPS6178287 U JP S6178287U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- discharge
- ports
- pump
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Description
第１図は本考案ポンプの第１実施例の要部を断
面で示した断面図、第２図は第２実施例を示す斜
視図、第３図は第３実施例を示す斜視図である。
２……板状マニホールド、３，４……吸込、吐
出配管連結口、５，６……吸込、吐出配管、７ａ
，７ｂ……吸込口、８ａ，８ｂ……吐出口、９ａ
，９ｂ……平板状圧電振動子ポンプ、１１ａ，１
１ｂ……吸込口突端部、１２ａ，１２ｂ……吐出
口突端部、１３……ネジ類、２６……環状パツキ
ン。
Fig. 1 is a sectional view showing the essential parts of the first embodiment of the pump of the present invention, Fig. 2 is a perspective view showing the second embodiment, and Fig. 3 is a perspective view showing the third embodiment. . 2... Plate manifold, 3, 4... Suction and discharge piping connection ports, 5, 6... Suction and discharge piping, 7a
, 7b...Suction port, 8a, 8b...Discharge port, 9a
, 9b... flat piezoelectric vibrator pump, 11a, 1
1b... Suction port tip, 12a, 12b... Discharge port tip, 13... Screws, 26... Annular packing.
Claims (1)
出配管連結口と、複数個の吸込口及び複数個の吐
出口とを備えた板状マニホールドの各吸込口及び
各吐出口に、それぞれ複数個の平板状圧電振動子
ポンプの各吸込口突端部及び各吐出口突端部を密
封嵌挿して複数個の平板状圧電振動子ポンプを連
結し、板状マニホールドに当該各ポンプをネジ類
で着脱自在に取り付けてなることを特徴とするポ
ンプ。 A plurality of flat plates are attached to each suction port and each discharge port of a plate-shaped manifold, which includes suction and discharge pipe connection ports connected to the suction and discharge pipes, and a plurality of suction ports and a plurality of discharge ports, respectively. A plurality of flat piezoelectric vibrator pumps are connected by sealingly fitting each suction port tip and each discharge port tip of the piezoelectric vibrator pumps, and each pump is removably attached to a plate manifold using screws. A pump that is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16442284U JPS6178287U (en) | 1984-10-29 | 1984-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16442284U JPS6178287U (en) | 1984-10-29 | 1984-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178287U true JPS6178287U (en) | 1986-05-26 |
Family
ID=30722283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16442284U Pending JPS6178287U (en) | 1984-10-29 | 1984-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178287U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014037799A (en) * | 2012-08-16 | 2014-02-27 | Ulvac Japan Ltd | Reciprocation pump |
| US20220056900A1 (en) * | 2019-06-27 | 2022-02-24 | Murata Manufacturing Co., Ltd. | Pump device |
-
1984
- 1984-10-29 JP JP16442284U patent/JPS6178287U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014037799A (en) * | 2012-08-16 | 2014-02-27 | Ulvac Japan Ltd | Reciprocation pump |
| US20220056900A1 (en) * | 2019-06-27 | 2022-02-24 | Murata Manufacturing Co., Ltd. | Pump device |
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