JPS6176959U - - Google Patents
Info
- Publication number
- JPS6176959U JPS6176959U JP16276384U JP16276384U JPS6176959U JP S6176959 U JPS6176959 U JP S6176959U JP 16276384 U JP16276384 U JP 16276384U JP 16276384 U JP16276384 U JP 16276384U JP S6176959 U JPS6176959 U JP S6176959U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette holder
- raise
- vertical plane
- base part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16276384U JPS6176959U (fr) | 1984-10-26 | 1984-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16276384U JPS6176959U (fr) | 1984-10-26 | 1984-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176959U true JPS6176959U (fr) | 1986-05-23 |
Family
ID=30720635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16276384U Pending JPS6176959U (fr) | 1984-10-26 | 1984-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176959U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (ja) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | ウェーハ容器傾け台 |
-
1984
- 1984-10-26 JP JP16276384U patent/JPS6176959U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (ja) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | ウェーハ容器傾け台 |