JPS6176955U - - Google Patents
Info
- Publication number
- JPS6176955U JPS6176955U JP16088284U JP16088284U JPS6176955U JP S6176955 U JPS6176955 U JP S6176955U JP 16088284 U JP16088284 U JP 16088284U JP 16088284 U JP16088284 U JP 16088284U JP S6176955 U JPS6176955 U JP S6176955U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- detection means
- semiconductor manufacturing
- explosion
- activated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000002485 combustion reaction Methods 0.000 claims 1
- 238000004880 explosion Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16088284U JPS6176955U (cs) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16088284U JPS6176955U (cs) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176955U true JPS6176955U (cs) | 1986-05-23 |
Family
ID=30718795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16088284U Pending JPS6176955U (cs) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176955U (cs) |
-
1984
- 1984-10-24 JP JP16088284U patent/JPS6176955U/ja active Pending
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