JPS6176955U - - Google Patents
Info
- Publication number
- JPS6176955U JPS6176955U JP16088284U JP16088284U JPS6176955U JP S6176955 U JPS6176955 U JP S6176955U JP 16088284 U JP16088284 U JP 16088284U JP 16088284 U JP16088284 U JP 16088284U JP S6176955 U JPS6176955 U JP S6176955U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- detection means
- semiconductor manufacturing
- explosion
- activated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000002485 combustion reaction Methods 0.000 claims 1
- 238000004880 explosion Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来例を示す側面図である。
１……排気管、２……目視ダクト、３……案内
棒、４……細線、５……外側ダクト、６……凹形
爆風受け板、７……外側、８……リミツトＳＷ、
９……リードワイヤー、１０……リードワイヤー
、１１……電磁コイル、１２……元バルブ、１３
……ガスボンベ、１４……ガス送気方向。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a side view showing a conventional example. 1...Exhaust pipe, 2...Visual duct, 3...Guide rod, 4...Thin wire, 5...Outside duct, 6...Concave blast receiving plate, 7...Outside, 8...Limit SW,
9... Lead wire, 10... Lead wire, 11... Electromagnetic coil, 12... Original valve, 13
...Gas cylinder, 14...Gas air supply direction.
Claims (1)
側排気管の内部に該排気管内での燃焼や爆発を検
知する検知手段を設け、この検知手段が作用した
ときに前記内側排気管の外側に外側排気管が落下
するようにしたことを特徴とする半導体製造装置
。 In an exhaust system for semiconductor manufacturing equipment, a detection means is provided inside an inner exhaust pipe to detect combustion or explosion within the exhaust pipe, and when this detection means is activated, an outer exhaust pipe is installed outside the inner exhaust pipe. 1. A semiconductor manufacturing device characterized in that the device is made to fall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16088284U JPS6176955U (en) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16088284U JPS6176955U (en) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176955U true JPS6176955U (en) | 1986-05-23 |
Family
ID=30718795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16088284U Pending JPS6176955U (en) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176955U (en) |
-
1984
- 1984-10-24 JP JP16088284U patent/JPS6176955U/ja active Pending
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