JPS6176355U - - Google Patents

Info

Publication number
JPS6176355U
JPS6176355U JP16042184U JP16042184U JPS6176355U JP S6176355 U JPS6176355 U JP S6176355U JP 16042184 U JP16042184 U JP 16042184U JP 16042184 U JP16042184 U JP 16042184U JP S6176355 U JPS6176355 U JP S6176355U
Authority
JP
Japan
Prior art keywords
silicon wafer
groove
globe
utility
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16042184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16042184U priority Critical patent/JPS6176355U/ja
Publication of JPS6176355U publication Critical patent/JPS6176355U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP16042184U 1984-10-25 1984-10-25 Pending JPS6176355U (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16042184U JPS6176355U (US06368395-20020409-C00050.png) 1984-10-25 1984-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16042184U JPS6176355U (US06368395-20020409-C00050.png) 1984-10-25 1984-10-25

Publications (1)

Publication Number Publication Date
JPS6176355U true JPS6176355U (US06368395-20020409-C00050.png) 1986-05-22

Family

ID=30718343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16042184U Pending JPS6176355U (US06368395-20020409-C00050.png) 1984-10-25 1984-10-25

Country Status (1)

Country Link
JP (1) JPS6176355U (US06368395-20020409-C00050.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630006A (en) * 1969-11-05 1971-12-28 Antonio A Sandoval Spiral capillary gas chromatographic column
JPS58195149A (ja) * 1982-04-26 1983-11-14 マイクロセンサ−・テクノロジ−・インコ−ポレ−テツド 小型ガスクロマトグラフ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630006A (en) * 1969-11-05 1971-12-28 Antonio A Sandoval Spiral capillary gas chromatographic column
JPS58195149A (ja) * 1982-04-26 1983-11-14 マイクロセンサ−・テクノロジ−・インコ−ポレ−テツド 小型ガスクロマトグラフ装置

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