JPS6175129U - - Google Patents
Info
- Publication number
- JPS6175129U JPS6175129U JP15977384U JP15977384U JPS6175129U JP S6175129 U JPS6175129 U JP S6175129U JP 15977384 U JP15977384 U JP 15977384U JP 15977384 U JP15977384 U JP 15977384U JP S6175129 U JPS6175129 U JP S6175129U
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- etching apparatus
- longitudinal direction
- jig
- loading jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15977384U JPS6175129U (cs) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15977384U JPS6175129U (cs) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6175129U true JPS6175129U (cs) | 1986-05-21 |
Family
ID=30717720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15977384U Pending JPS6175129U (cs) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6175129U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6391703U (cs) * | 1986-12-03 | 1988-06-14 |
-
1984
- 1984-10-24 JP JP15977384U patent/JPS6175129U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6391703U (cs) * | 1986-12-03 | 1988-06-14 |