JPS6175126U - - Google Patents
Info
- Publication number
- JPS6175126U JPS6175126U JP15935084U JP15935084U JPS6175126U JP S6175126 U JPS6175126 U JP S6175126U JP 15935084 U JP15935084 U JP 15935084U JP 15935084 U JP15935084 U JP 15935084U JP S6175126 U JPS6175126 U JP S6175126U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion furnace
- temperature distribution
- heating
- reaction tube
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15935084U JPS6175126U (enExample) | 1984-10-22 | 1984-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15935084U JPS6175126U (enExample) | 1984-10-22 | 1984-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6175126U true JPS6175126U (enExample) | 1986-05-21 |
Family
ID=30717307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15935084U Pending JPS6175126U (enExample) | 1984-10-22 | 1984-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6175126U (enExample) |
-
1984
- 1984-10-22 JP JP15935084U patent/JPS6175126U/ja active Pending
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