JPS6174949U - - Google Patents
Info
- Publication number
- JPS6174949U JPS6174949U JP15800284U JP15800284U JPS6174949U JP S6174949 U JPS6174949 U JP S6174949U JP 15800284 U JP15800284 U JP 15800284U JP 15800284 U JP15800284 U JP 15800284U JP S6174949 U JPS6174949 U JP S6174949U
- Authority
- JP
- Japan
- Prior art keywords
- signal
- image
- sample
- storage means
- display device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Processing Of Color Television Signals (AREA)
Description
第１図は本考案の一実施例を示すための図、第
２図は第１図に示した一実施例装置の各回路素子
よりの出力信号を例示するための図、第３図は正
規なパターンを例示するための図、第４図は陰極
線管の画面の表示例を示すための図、第５図は検
査すべきパターンと正規なパターンとを重畳して
表示した場合の陰極線管画面を例示するための図
、第６図は本考案の一実施例を示すための図であ
る。
１：電子銃、２：電子線、３：集束レンズ、４
：対物レンズ、５：ＩＣウエハー、６ｘ，６ｙ：
偏向コイル、７ｘ，７ｙ：同期信号発生回路、８
ｘ，８ｙ：走査信号発生回路、１０：フリツプフ
ロツプ回路、１１：レベル変換回路、１２：ポテ
ンシヨメーター、１３：加算回路、１４ｘ，１４
ｙ：偏向増幅器、１５：陰極線管、１６：検出器
、１７：増幅器、１８：切換スイツチ、１９，２
６，２７：オンオフスイツチ、２０：スイツチン
グ回路、２１：映像増幅器、２２：映像信号記憶
再生装置、２３：ＡＤ変換器、２４：イメージメ
モリ、２５：ＤＡ変換器、２８：カラービデオ増
幅器。
Fig. 1 is a diagram showing an embodiment of the present invention, Fig. 2 is a diagram illustrating output signals from each circuit element of the embodiment shown in Fig. 1, and Fig. 3 is a diagram showing a normal Figure 4 is a diagram showing an example of a cathode ray tube screen display; Figure 5 is a cathode ray tube screen when the pattern to be inspected and the normal pattern are displayed in a superimposed manner. FIG. 6 is a diagram showing an embodiment of the present invention. 1: Electron gun, 2: Electron beam, 3: Focusing lens, 4
: Objective lens, 5: IC wafer, 6x, 6y:
Deflection coil, 7x, 7y: synchronous signal generation circuit, 8
x, 8y: scanning signal generation circuit, 10: flip-flop circuit, 11: level conversion circuit, 12: potentiometer, 13: addition circuit, 14x, 14
y: deflection amplifier, 15: cathode ray tube, 16: detector, 17: amplifier, 18: selector switch, 19,2
6, 27: on/off switch, 20: switching circuit, 21: video amplifier, 22: video signal storage/reproduction device, 23: AD converter, 24: image memory, 25: DA converter, 28: color video amplifier.
Claims (1)
走査に伴つて試料より得られる情報信号を検出器
により検出し、該検出信号を該走査と同期走査さ
れている表示装置に導入して該試料の像を表示す
るようにした装置において、該検出信号を記憶す
るための画像信号記憶手段と、該画像信号記憶手
段よりの信号と前記検出器よりの信号を切換えて
該表示装置に導入することにより該検出器よりの
信号に基づく第１の像と該画像信号記憶手段より
の出力信号に基づく第２の像を該表示装置の画面
上に異つた輝度又は色相で重畳して表示するため
の手段を具備することを特徴とする電子線装置。 An electron beam is scanned two-dimensionally on a sample, an information signal obtained from the sample is detected by a detector during the scanning, and the detection signal is introduced into a display device that is scanned in synchronization with the scanning. In an apparatus configured to display an image of a sample, an image signal storage means for storing the detection signal, and a signal from the image signal storage means and a signal from the detector are switched and introduced into the display device. thereby displaying a first image based on the signal from the detector and a second image based on the output signal from the image signal storage means in a superimposed manner on the screen of the display device with different brightness or hue. An electron beam device characterized by comprising the following means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984158002U JPH0629886Y2 (en) | 1984-10-19 | 1984-10-19 | Electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984158002U JPH0629886Y2 (en) | 1984-10-19 | 1984-10-19 | Electron beam equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6174949U true JPS6174949U (en) | 1986-05-21 |
| JPH0629886Y2 JPH0629886Y2 (en) | 1994-08-10 |
Family
ID=30715988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984158002U Expired - Lifetime JPH0629886Y2 (en) | 1984-10-19 | 1984-10-19 | Electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0629886Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143668A (en) * | 1974-10-14 | 1976-04-14 | Hitachi Ltd |
-
1984
- 1984-10-19 JP JP1984158002U patent/JPH0629886Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143668A (en) * | 1974-10-14 | 1976-04-14 | Hitachi Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0629886Y2 (en) | 1994-08-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0237174A3 (en) | Device for displaying wide-aspect images on a non-wide-aspect screen | |
| US6750921B1 (en) | Projection video display with photo transistor sensors | |
| JPS6174949U (en) | ||
| JPS6359191A (en) | Digital convergence device | |
| JPH052033B2 (en) | ||
| JPH0241332B2 (en) | ||
| JPH02226295A (en) | Display device | |
| JPH043266Y2 (en) | ||
| WO2001039510A1 (en) | Automated convergence in a projection display apparatus | |
| JP2607807B2 (en) | Video synthesis method and apparatus | |
| JPH0373198B2 (en) | ||
| JPH05227536A (en) | Digital convergence device | |
| JPS5842382A (en) | Digital convergence device | |
| JP3337151B2 (en) | Display device having digital convergence correction device | |
| JPH0654341A (en) | Video signal processing circuit | |
| JPH0614689B2 (en) | Video display | |
| JPS6231474B2 (en) | ||
| JP3263849B2 (en) | Display device | |
| EP1065891A1 (en) | Projection video display with photo transistor sensors | |
| JPH0724858Y2 (en) | Fricker removal device | |
| JPS60102078A (en) | Image pickup device picking up weak video image | |
| JPS59110286A (en) | Improving method of video due to defective channel | |
| JPS6264970A (en) | Video map generating circuit of radar | |
| JPS59113962U (en) | A device for photographing images displayed on a cathode ray tube | |
| JPH03120984A (en) | High definition television display device |