JPS6172852U - - Google Patents

Info

Publication number
JPS6172852U
JPS6172852U JP15857984U JP15857984U JPS6172852U JP S6172852 U JPS6172852 U JP S6172852U JP 15857984 U JP15857984 U JP 15857984U JP 15857984 U JP15857984 U JP 15857984U JP S6172852 U JPS6172852 U JP S6172852U
Authority
JP
Japan
Prior art keywords
arm
drive source
rotated
rotatably supported
chuck support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15857984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019166Y2 (US20110009641A1-20110113-C00185.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15857984U priority Critical patent/JPH019166Y2/ja
Publication of JPS6172852U publication Critical patent/JPS6172852U/ja
Application granted granted Critical
Publication of JPH019166Y2 publication Critical patent/JPH019166Y2/ja
Expired legal-status Critical Current

Links

JP15857984U 1984-10-19 1984-10-19 Expired JPH019166Y2 (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15857984U JPH019166Y2 (US20110009641A1-20110113-C00185.png) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15857984U JPH019166Y2 (US20110009641A1-20110113-C00185.png) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6172852U true JPS6172852U (US20110009641A1-20110113-C00185.png) 1986-05-17
JPH019166Y2 JPH019166Y2 (US20110009641A1-20110113-C00185.png) 1989-03-13

Family

ID=30716557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15857984U Expired JPH019166Y2 (US20110009641A1-20110113-C00185.png) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPH019166Y2 (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02132842A (ja) * 1988-07-13 1990-05-22 Tel Sagami Ltd 半導体ウエハの移載装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02132842A (ja) * 1988-07-13 1990-05-22 Tel Sagami Ltd 半導体ウエハの移載装置

Also Published As

Publication number Publication date
JPH019166Y2 (US20110009641A1-20110113-C00185.png) 1989-03-13

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