JPS6172850U - - Google Patents
Info
- Publication number
- JPS6172850U JPS6172850U JP15745384U JP15745384U JPS6172850U JP S6172850 U JPS6172850 U JP S6172850U JP 15745384 U JP15745384 U JP 15745384U JP 15745384 U JP15745384 U JP 15745384U JP S6172850 U JPS6172850 U JP S6172850U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- dioxide layer
- silicon dioxide
- phenomenon
- charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、この考案の一実施例の構成を示す断
面図である。 １……Ｐ形シリコン基板、２……二酸化シリコ
ン層、３……シリコンリツチな二酸化シリコン層
。
面図である。 １……Ｐ形シリコン基板、２……二酸化シリコ
ン層、３……シリコンリツチな二酸化シリコン層
。
Claims (1)
- シリコン基板１を保護する二酸化シリコン層２
の表面に、シリコンリツチな二酸化シリコン層３
を形成したことを特徴とするチヤージアツプ現象
防止構造を有する半導体素子。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745384U JPH037951Y2 (ja) | 1984-10-18 | 1984-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745384U JPH037951Y2 (ja) | 1984-10-18 | 1984-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6172850U true JPS6172850U (ja) | 1986-05-17 |
| JPH037951Y2 JPH037951Y2 (ja) | 1991-02-27 |
Family
ID=30715446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15745384U Expired JPH037951Y2 (ja) | 1984-10-18 | 1984-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037951Y2 (ja) |
-
1984
- 1984-10-18 JP JP15745384U patent/JPH037951Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037951Y2 (ja) | 1991-02-27 |