JPS6172679U - - Google Patents
Info
- Publication number
- JPS6172679U JPS6172679U JP15722484U JP15722484U JPS6172679U JP S6172679 U JPS6172679 U JP S6172679U JP 15722484 U JP15722484 U JP 15722484U JP 15722484 U JP15722484 U JP 15722484U JP S6172679 U JPS6172679 U JP S6172679U
- Authority
- JP
- Japan
- Prior art keywords
- movable beam
- polysilicon film
- acceleration sensor
- semiconductor
- semiconductor acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
- 229920005591 polysilicon Polymers 0.000 claims 2
- 239000003513 alkali Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15722484U JPS6172679U (it) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15722484U JPS6172679U (it) | 1984-10-19 | 1984-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6172679U true JPS6172679U (it) | 1986-05-17 |
Family
ID=30715222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15722484U Pending JPS6172679U (it) | 1984-10-19 | 1984-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6172679U (it) |
-
1984
- 1984-10-19 JP JP15722484U patent/JPS6172679U/ja active Pending