JPS6172678U - - Google Patents

Info

Publication number

JPS6172678U

JPS6172678U JP15722684U JP15722684U JPS6172678U JP S6172678 U JPS6172678 U JP S6172678U JP 15722684 U JP15722684 U JP 15722684U JP 15722684 U JP15722684 U JP 15722684U JP S6172678 U JPS6172678 U JP S6172678U

Authority

JP

Japan

Prior art keywords

cantilever beam

detecting

diffused resistor

semiconductor

reflowing

Prior art date

1984-10-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
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• 229910000679 solder Inorganic materials 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 230000001133 acceleration Effects 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 239000002184 metal Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1
• 239000011800 void material Substances 0.000 description 1

Cited By (2)