JPS6172677U - - Google Patents
Info
- Publication number
- JPS6172677U JPS6172677U JP15722584U JP15722584U JPS6172677U JP S6172677 U JPS6172677 U JP S6172677U JP 15722584 U JP15722584 U JP 15722584U JP 15722584 U JP15722584 U JP 15722584U JP S6172677 U JPS6172677 U JP S6172677U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- diffused resistor
- semiconductor
- deviation
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000009713 electroplating Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15722584U JPH0320780Y2 (https=) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15722584U JPH0320780Y2 (https=) | 1984-10-19 | 1984-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6172677U true JPS6172677U (https=) | 1986-05-17 |
| JPH0320780Y2 JPH0320780Y2 (https=) | 1991-05-07 |
Family
ID=30715223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15722584U Expired JPH0320780Y2 (https=) | 1984-10-19 | 1984-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320780Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177872A (ja) * | 1986-09-12 | 1988-07-22 | インターメディクス インコーポレーテッド | 速度応答式心臓ペースメーカー |
-
1984
- 1984-10-19 JP JP15722584U patent/JPH0320780Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177872A (ja) * | 1986-09-12 | 1988-07-22 | インターメディクス インコーポレーテッド | 速度応答式心臓ペースメーカー |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0320780Y2 (https=) | 1991-05-07 |