JPS617253Y2 - - Google Patents

Info

Publication number
JPS617253Y2
JPS617253Y2 JP16714680U JP16714680U JPS617253Y2 JP S617253 Y2 JPS617253 Y2 JP S617253Y2 JP 16714680 U JP16714680 U JP 16714680U JP 16714680 U JP16714680 U JP 16714680U JP S617253 Y2 JPS617253 Y2 JP S617253Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16714680U
Other languages
Japanese (ja)
Other versions
JPS5792767U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16714680U priority Critical patent/JPS617253Y2/ja
Publication of JPS5792767U publication Critical patent/JPS5792767U/ja
Application granted granted Critical
Publication of JPS617253Y2 publication Critical patent/JPS617253Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP16714680U 1980-11-20 1980-11-20 Expired JPS617253Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16714680U JPS617253Y2 (en, 2012) 1980-11-20 1980-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16714680U JPS617253Y2 (en, 2012) 1980-11-20 1980-11-20

Publications (2)

Publication Number Publication Date
JPS5792767U JPS5792767U (en, 2012) 1982-06-08
JPS617253Y2 true JPS617253Y2 (en, 2012) 1986-03-05

Family

ID=29525794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16714680U Expired JPS617253Y2 (en, 2012) 1980-11-20 1980-11-20

Country Status (1)

Country Link
JP (1) JPS617253Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042734U (ja) * 1983-08-31 1985-03-26 富士通株式会社 液相エピタキシャル成長装置

Also Published As

Publication number Publication date
JPS5792767U (en, 2012) 1982-06-08

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