JPS617253Y2 - - Google Patents

Info

Publication number
JPS617253Y2
JPS617253Y2 JP16714680U JP16714680U JPS617253Y2 JP S617253 Y2 JPS617253 Y2 JP S617253Y2 JP 16714680 U JP16714680 U JP 16714680U JP 16714680 U JP16714680 U JP 16714680U JP S617253 Y2 JPS617253 Y2 JP S617253Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16714680U
Other languages
Japanese (ja)
Other versions
JPS5792767U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16714680U priority Critical patent/JPS617253Y2/ja
Publication of JPS5792767U publication Critical patent/JPS5792767U/ja
Application granted granted Critical
Publication of JPS617253Y2 publication Critical patent/JPS617253Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP16714680U 1980-11-20 1980-11-20 Expired JPS617253Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16714680U JPS617253Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-20 1980-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16714680U JPS617253Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-20 1980-11-20

Publications (2)

Publication Number Publication Date
JPS5792767U JPS5792767U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-06-08
JPS617253Y2 true JPS617253Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-05

Family

ID=29525794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16714680U Expired JPS617253Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-20 1980-11-20

Country Status (1)

Country Link
JP (1) JPS617253Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042734U (ja) * 1983-08-31 1985-03-26 富士通株式会社 液相エピタキシャル成長装置

Also Published As

Publication number Publication date
JPS5792767U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-06-08

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