JPS617205Y2 - - Google Patents
Info
- Publication number
- JPS617205Y2 JPS617205Y2 JP13514681U JP13514681U JPS617205Y2 JP S617205 Y2 JPS617205 Y2 JP S617205Y2 JP 13514681 U JP13514681 U JP 13514681U JP 13514681 U JP13514681 U JP 13514681U JP S617205 Y2 JPS617205 Y2 JP S617205Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13514681U JPS5842131U (ja) | 1981-09-11 | 1981-09-11 | オゾナイザ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13514681U JPS5842131U (ja) | 1981-09-11 | 1981-09-11 | オゾナイザ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5842131U JPS5842131U (ja) | 1983-03-19 |
| JPS617205Y2 true JPS617205Y2 (en:Method) | 1986-03-05 |
Family
ID=29928529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13514681U Granted JPS5842131U (ja) | 1981-09-11 | 1981-09-11 | オゾナイザ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842131U (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2605100B2 (ja) * | 1988-04-28 | 1997-04-30 | 東京エレクトロン株式会社 | オゾン発生装置 |
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1981
- 1981-09-11 JP JP13514681U patent/JPS5842131U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5842131U (ja) | 1983-03-19 |