JPS6171815A - Composite ceramic filter and preparation therefor - Google Patents
Composite ceramic filter and preparation thereforInfo
- Publication number
- JPS6171815A JPS6171815A JP19451584A JP19451584A JPS6171815A JP S6171815 A JPS6171815 A JP S6171815A JP 19451584 A JP19451584 A JP 19451584A JP 19451584 A JP19451584 A JP 19451584A JP S6171815 A JPS6171815 A JP S6171815A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- filter
- filtration layer
- ceramic filter
- bottomed cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Filtering Materials (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Abstract
Description
〔産業上の利用分野〕
本発明%工流体状混合物のうち所定の特性を有する流体
状物の選択的流出乃至通過を許容する有底のフィルタに
係る。
このようなフィルタとしては、流体状混合物中の所定の
サイズ以下の粒径ヲ宵するものの選択的通過を許容する
フィルタすなわちr過器、及び流体状混合物中の所与の
化学的組成の成分1例えは燃焼生成物中の不完全燃焼生
成物な所定の特性な(Tする流体状物1例えば完全燃焼
生成物の形に変換して流出せしめる触媒フィルタ等があ
る。
〔従来の技術〕
セラミック與の多孔質の有底筒状体からなる品温用セラ
ミックフィルタは知られている(例えは特開昭55−1
19412〜4号公報及び特開昭55−137021〜
2号公報)。
この公知の有底筒状体製セラミックフィルタでは、筒状
体の壁部がその厚さ方向の各部において。
はソ一様な細孔径及び組成等を有している。換言すれは
、前記の公知の有底筒状体製セラミックフィルタでは、
筒状体の壁部がその厚さ方向の各部において実質的く一
様なフィルタ特性を有している。
〔発明が解決しようとする問題点〕
しかし乍ら、この種の従来の有底筒状体表セラミックフ
ィルタでは、筒状体の壁部がその厚さ方向の各部におい
て実質的に一様なフィルタ特性を有している故忙、大き
な機械的強度にしようとするとP過圧等を大きくする必
要が生じたり、所本発明は前記した点に鑑みなされたも
のであり。
その目的とするところは、所望のフィルタ特性の濾過層
を有しており、比較的大きな機械的強度を有する製造の
容易な有底筒状体製の複合セラミックフィルタを提供す
ることにある。
〔問題点を解決するための手段〕
本発明によれは、前記目的は、セラミック製の多孔質の
第一有底筒状支持体の内表面に外表面が支持され、セラ
ミック製の多孔質の第二有底筒状支持体の外表面に内表
面が支持されるよ5に第一及び第二支持体の間に設けら
れたセラミック製の有底筒状濾過層を有する複合セラミ
ックフィルタによって達成される。
〔作用及び効果〕
本発明の複合セラミックフィルタは1.###タセラミ
ック製の多孔質の第一有底筒状支持体の内表面に外表面
が支−持され、セラミック製の多孔質の第二有底筒状支
持体の外表面に内表面が支持されるよ5に第一及び第二
支持体の間に設けられたセラミック製の有底筒状濾過層
を有している故。
211−及び第二の支持体によって濾過層に十分な機械
的強度を付与し得るため、濾過層自体の機械的強度をI
Q駄することなく、i濾過層を薄く、乃至所望の触媒活
性乃至化学的性1乍のセラミックで形成し得、所望のフ
ィルタ特性が付与され得る。
しかも1本発明の複合セラミックフィルタは。
セラミックB5の多孔qtの第一有底筒状支持体の内表
面とセラミック裂の多孔質の第二有底筒状支持−及び&
゛5二支持体間にセラミックM濾過Jり1を形成すべく
可燃性バインダを情夫せしめることによって容易に製造
され得る。
〔実施例〕
次に本発明による好ましい実施例を図面に基づい[Industrial Application Field] The present invention relates to a bottomed filter that allows selective outflow or passage of a fluid having predetermined characteristics from a fluid-like mixture. Such filters include filters or filters that allow selective passage of particles of a given chemical composition in a fluid mixture, and particles of a given chemical composition in a fluid mixture. An example of this is a catalytic filter that converts a fluid with certain characteristics (such as incomplete combustion products) into a complete combustion product form and allows it to flow out. [Prior art] Ceramic filter Ceramic filters for temperature control consisting of a porous bottomed cylindrical body are known (for example, Japanese Patent Laid-Open No. 55-1
19412-4 and JP-A-55-137021-
Publication No. 2). In this known ceramic filter made of a bottomed cylindrical body, the wall portion of the cylindrical body is thick at each portion in the thickness direction. has a uniform pore diameter, composition, etc. In other words, in the above-mentioned known ceramic filter made of a bottomed cylindrical body,
The wall of the cylindrical body has substantially uniform filter characteristics throughout its thickness. [Problems to be Solved by the Invention] However, in this type of conventional bottomed cylindrical ceramic filter, the wall of the cylindrical body is substantially uniform throughout the thickness direction of the filter. However, if a large mechanical strength is to be achieved, it becomes necessary to increase the P overpressure, etc. The present invention was developed in view of the above-mentioned points. The object is to provide a composite ceramic filter made of a bottomed cylindrical body that has a filtration layer with desired filter characteristics, has relatively high mechanical strength, and is easy to manufacture. [Means for Solving the Problems] According to the present invention, the above object is to provide a ceramic porous first bottomed cylindrical support whose outer surface is supported on the inner surface of the ceramic porous first bottomed cylindrical support. Achieved by a composite ceramic filter having a ceramic bottomed cylindrical filtration layer provided between the first and second supports so that the inner surface is supported on the outer surface of the second bottomed cylindrical support. be done. [Operations and Effects] The composite ceramic filter of the present invention has 1. ### The outer surface is supported on the inner surface of a first ceramic porous cylindrical support, and the inner surface is supported on the outer surface of a second ceramic porous cylindrical support. 5 has a bottomed ceramic cylindrical filtration layer provided between the first and second supports. 211- and the second support can impart sufficient mechanical strength to the filtration layer, so the mechanical strength of the filtration layer itself can be increased by I
The filtration layer can be made thin or made of ceramic having the desired catalytic activity or chemical properties without sacrificing quality, and the desired filter characteristics can be imparted. Moreover, the composite ceramic filter of the present invention is. The inner surface of the ceramic B5 porous qt first bottomed cylindrical support and the ceramic fissure porous second bottomed cylindrical support - and &
5. It can be easily manufactured by applying a combustible binder to form a ceramic M filter 1 between two supports. [Example] Next, a preferred example according to the present invention will be described based on the drawings.
【説明
するつ
第】図には本発明による好ましい一実施例の複合セラミ
ックフィルタ1が示されている。
セラミックフィルタlは、第一有底筒状支持体とし【の
外筒部2及び第二有底筒状支持体としての内筒部3.並
びに外筒部2及び内筒部3の間に設けられた濾過層4か
もなる。
多孔質セラミックからなる外筒部2は、その円筒状本体
部5の一端6側に半球状の底部7を有しており、開口さ
れた他l1I8@にフランジ部9を有している。
セラミック粉が充填されてなる濾過層41;r:、その
外側表面lOで外筒部2の全内側表面11に密接・支持
されており、その円筒状本体部12の一端13側に半球
状の底部14を有し、他端15側で開口されている。尚
、t−1過層1g!4を構成するセラミック粉は部分的
に又は全体が焼結されていてもよく、外及び円筒部2.
3を構成する多孔質セラミックに焼結・固定されていて
もよい。
多孔質セラミックよりなる円筒部3は、その全外側表面
16で濾過層4の全内側表面17を支持しており、その
円筒状本体部18の一端19側に半球状の底部20を有
し、他端21側で開口されているり
多孔質セラミックよりなる外筒部2及び内筒部3の細孔
径は、F:i静層4を構成している充填セラミック材料
粉の間に形放されており流体状物の選択的通過を許容す
る通路の大きさC以下では「(粉体製)F1層4の細孔
径」という)よりも大きく、複合セラミックフィルタl
を通過し得る流体状物中の粒子の粒径の上限は濾過層4
の細孔径によって規定され【いる。
d」湯層4を構成しているセラミック粉が単に簡2.3
間に充填されている場合、セラミック粉の粒径は、外筒
部2及び内筒部3の細孔径よりも大きい、従つ【、濾過
及び逆洗の際濾過層4を4J[しているセラミック粉が
外筒部2及び内筒部3め細孔を通って流出する虞れがな
い。
尚、外筒部2の細孔径は内筒部3の細孔径と同一でも、
内筒部3の細孔iよりも大きり゛〔も、小さくてもよ−
・。濾過の際、外筒部2の細孔及び内筒部3の細孔での
圧力損失が実質的に無視し得るように、外筒部2及び内
fg部3の細孔径は濾過層4の細孔径よりも十分に大き
い。
−1外筒部2及び内筒ll53は、濾過圧に耐えるに十
分な機械的強度を有するように、その材料。
焼結度、細孔径等に応じて、所望σ・厚さを膏する。
濾過層4の細孔径は、FA眉4を構成するセラミック粒
子の平均粒度及び大小粒度の粒子の配合割合を変えるこ
とによって詞整され得る。濾過層4の厚さ、換言すれは
外筒2の内表面11と内筒3の外表面16との間の距離
は、FlA層4の内外表面17.10間を貫通している
濾過層4の各細孔の最小径部分の大きさが所与の大きさ
以下となるように、且つ濾過層4の一方の表面1例えは
内表面1丁で開口している細孔のうち好ましくはできる
だけ多(の細孔が外表面lOまで貫通するように選択さ
れる。
外筒2.内筒3.及び濾過rt44を構成するセラミッ
クの種類は、FAされるべき泥状物の1類及び大きさ、
流状物中のP遇されるべきでない粒子乃〒流1体h14
分の種類及び大きさ、濾過の際のFAされるべき流状物
の温度、並びKF濾過圧に応じて選択され、同一でも、
相互に異なっていても、一部同一でもよい。外筒2.及
び内筒3を構成するセラミックとしては1例えはアルミ
ナ、コーディライlが用いられ、1過層を構成するセラ
ミック材料としては1例えは、アルミナ、コープイライ
ト等が用いられる。
尚、フランジ部9は複合セラミックフィルタlが支持乃
至固定されるべき部分であり、場合によってはなくても
よい。
また筒2.3の横断面の形状は円形のかわりに楕円形、
多角形等信の形状でもよい。
更に、複合フィルタ1において濾過層4の底部14を円
筒状本体部12よりも厚くするかまた底s14の細孔径
を極めて小さくして、実際上円筒状本体部12のみがろ
過層として働くようにしてもよい。
以上の如ぐ構成された複合セラミックフィルタ1では、
そのフィルタ特性を規定しているFMS4がセラミック
製内外筒3.2により【両側から支持されている故、実
際上フィルタ特性に関する要件のみを満たすように適当
な材質、厚さ等のセラミック製濾過層が使用され得る。
その結果、複合セラミックフィルタlは比較的大きな機
械的強度を有したま\、広範囲の用途に適合する所望の
フィルタ特性を:f′5°し得る。5
尚1以上の如く構成された複合セラミックフィルタは、
好ましくは1例えは以下の手順で容易に作製され得る。
まず最初にjへ当な可燃性バインダで固めたセラミック
材料粉を所定の位置関係で適当な保持手段によって保持
された内外筒3.2間の空間に充填たもの(以下では[
バインダ結合セラミック]といり)が流動性を有する場
合、このバインダ結合セラミックを適当虐゛外筒2中に
入れた後、このバインダ結合セラミック中に内筒3を適
当な深さまで押し込んで内外筒3,2間にバインダ結合
セラミックな滴たすよ5にしてもよい。
次にバインダ結合セラミックが内外筒3.2間に配され
°、たものを、適当な温度まで加熱して可燃性バインダ
を焼きとばすことによって複合セラミックフィルタを形
成する。
以上において可燃性バインダとしては1例えヲエ(しシ
j) 。
PVA、 ゛ ノ・ルプ廃液等が用
いられる。
尚、前記焼きとはしステップにお〜・て、セラミック桐
料粉を焼結させ℃も、させた(ても、また部分的に焼結
させてもよい。
また、セラミック材料粉自体は必ずしも化ラミックでな
(てもよく、可燃性〕(インダの焼きとを1しステップ
において所望のセラミックに熱分解せしめられ得るもの
でもよい。
また、セラミック材料粉は1例え&工炭素粉婢の可燃性
粒子を含んでいてもより、)(インダの焼きとはしステ
ップにおい℃同時に焼失させて、濾過層に人為的に細孔
を形成させてもよ(・。
尚、複合セラミックフィルタのe湯層+−2第1図の如
(単一層4かもなるかわりに、@2図に示すλ3.Zり
如く積層された二Nか中〒中4からなって−・てもよく
、また三層以上からなっていてもよい。i2図の抜廿で
ラミックフィルタ22では、二つの11過I曽23,2
4は触媒フィルタとしての特性、又は+WI Eatフ
ィルタとしての特性及びyI過される粒径に関するフィ
ルタ特性の点で相互に異なる。従って、 JQ合セジミ
ックフィルタ22では、単一の濾過1(1では果たし得
ない複合的なフィルタ機能をコンパクトな構成のま\で
有し得る。
この機会セラミックフィルタ22を作成する場合1例え
は、1過I#24と同様な外形を有するせ底円筒状の冶
具を内筒3のかわりに用いて前記フし、所望ならばこの
バインダ結合セラミックの流動性を加熱等により低下せ
しめた後、冶具な抜き。
更に前記と同様にして濾過層23用のバインダ結合セラ
ミック層と内筒3との間に濾過層24用の別のバインダ
結合セラミックを配し、可燃性バインダを焼きとばすこ
とによって形成される。DETAILED DESCRIPTION OF THE INVENTION The figure shows a composite ceramic filter 1 according to a preferred embodiment of the present invention. The ceramic filter l has an outer cylinder part 2 as a first bottomed cylindrical support and an inner cylinder part 3 as a second bottomed cylindrical support. It also includes a filtration layer 4 provided between the outer cylinder part 2 and the inner cylinder part 3. The outer cylinder part 2 made of porous ceramic has a hemispherical bottom part 7 on one end 6 side of the cylindrical main body part 5, and has a flange part 9 at the open end 11I8@. A filtration layer 41 filled with ceramic powder is closely supported by the entire inner surface 11 of the outer cylindrical portion 2 at its outer surface 10, and has a hemispherical shape on the one end 13 side of the cylindrical main body 12. It has a bottom portion 14 and is open at the other end 15 side. In addition, 1g of t-1 superlayer! The ceramic powder constituting the outer and cylindrical portion 2.4 may be partially or wholly sintered.
It may be sintered and fixed to the porous ceramic constituting No. 3. The cylindrical portion 3 made of porous ceramic supports the entire inner surface 17 of the filtration layer 4 with its entire outer surface 16, and has a hemispherical bottom portion 20 at one end 19 of its cylindrical body portion 18; The pore diameter of the outer cylinder part 2 and the inner cylinder part 3, which are open on the other end 21 side and are made of porous ceramic, is formed between the filled ceramic material powder forming the F:i static layer 4. If the size of the passage that allows the selective passage of fluid is smaller than C, it is larger than the "pore diameter of F1 layer 4 (made of powder)", and the composite ceramic filter l
The upper limit of the particle size of particles in the fluid that can pass through the filtration layer 4 is
It is defined by the pore size of d) Ceramic powder constituting the hot water layer 4 is easily 2.3
When the ceramic powder is filled in between the particles, the particle size of the ceramic powder is larger than the pore size of the outer cylinder part 2 and the inner cylinder part 3, so that the filtration layer 4 is 4J [during filtration and backwashing]. There is no possibility that the ceramic powder will flow out through the pores of the outer cylindrical part 2 and the inner cylindrical part 3. In addition, even if the pore diameter of the outer cylinder part 2 is the same as the pore diameter of the inner cylinder part 3,
It may be larger or smaller than the pore i of the inner cylinder part 3.
・. During filtration, the pore diameters of the outer cylinder part 2 and the inner fg part 3 are set so that the pressure loss in the pores of the outer cylinder part 2 and the pores of the inner cylinder part 3 can be substantially ignored. Sufficiently larger than the pore diameter. -1 The outer cylinder part 2 and the inner cylinder 1153 are made of materials that have sufficient mechanical strength to withstand the filtration pressure. Apply the desired σ and thickness depending on the degree of sintering, pore diameter, etc. The pore diameter of the filtration layer 4 can be adjusted by changing the average particle size of the ceramic particles constituting the FA eyebrow 4 and the blending ratio of large and small particles. The thickness of the filtration layer 4, in other words, the distance between the inner surface 11 of the outer cylinder 2 and the outer surface 16 of the inner cylinder 3 is the thickness of the filtration layer 4 that penetrates between the inner and outer surfaces 17 and 10 of the FlA layer 4. Preferably, the size of the smallest diameter portion of each pore is smaller than a given size, and among the pores that are open on one surface of the filtration layer 4, for example, one inner surface, preferably as much as possible. The pores are selected so that they penetrate to the outer surface 10. The type of ceramic that constitutes the outer cylinder 2, inner cylinder 3, and filtration rt44 is determined according to the type and size of the slurry to be FA. ,
Particles in a fluid that should not be treated 〒Flow 1 body h14
It is selected according to the type and size of the filter, the temperature of the fluid to be subjected to FA during filtration, and the KF filtration pressure, and even if they are the same,
They may be different from each other or may be partially the same. Outer cylinder 2. For example, alumina or cordierite is used as the ceramic material constituting the inner cylinder 3, and alumina or cordierite is used as the ceramic material constituting the first layer. Note that the flange portion 9 is a portion to which the composite ceramic filter 1 is to be supported or fixed, and may be omitted depending on the case. Also, the cross-sectional shape of the tube 2.3 is oval instead of circular.
It may also be a polygonal shape. Furthermore, in the composite filter 1, the bottom 14 of the filtration layer 4 is made thicker than the cylindrical main body 12, or the pore diameter of the bottom s14 is made extremely small, so that only the cylindrical main body 12 actually functions as a filtration layer. It's okay. In the composite ceramic filter 1 configured as above,
Since the FMS 4, which defines the filter characteristics, is supported from both sides by the ceramic inner and outer cylinders 3.2, the ceramic filter layer is made of suitable material and thickness to satisfy only the requirements regarding the filter characteristics. may be used. As a result, the composite ceramic filter l has relatively high mechanical strength, yet can exhibit the desired filter properties suitable for a wide range of applications. 5. The composite ceramic filter configured as above 1.
Preferably, one example can be easily produced by the following procedure. First, ceramic material powder hardened with a suitable combustible binder is filled into the space between the inner and outer cylinders 3.2 held in a predetermined positional relationship by appropriate holding means (hereinafter referred to as [
When the binder-bonded ceramic] has fluidity, the binder-bonded ceramic is appropriately pressed into the outer cylinder 2, and then the inner cylinder 3 is pushed into the binder-bonded ceramic to an appropriate depth to form the inner and outer cylinders 3. , a drop of binder-bonded ceramic may be placed between the two. A binder-bonded ceramic is then placed between the inner and outer cylinders 3.2, and the composite ceramic filter is formed by heating the material to an appropriate temperature to burn off the combustible binder. In the above, one example of a combustible binder is ``e''. PVA, waste liquid, etc. are used. In addition, in the above-mentioned firing and chopping steps, the ceramic material powder is sintered at a temperature of It is also possible to use ceramic material powder (which may be flammable) (which can be thermally decomposed into the desired ceramic in one step after firing the indica). (Even if the composite ceramic filter contains particles, it may be burned out at the same time in the indashing and chopping steps to artificially form pores in the filtration layer.) Layer +-2 as shown in Figure 1 (instead of being a single layer 4, it can also be made of 2N or 2N layered as shown in Figure 2) or 3 layers (instead of a single layer 4) as shown in Figure 2. In the extraction of the i2 diagram, the Ramic filter 22 has two 11-pass I so 23, 2
No. 4 differs from each other in terms of the characteristics as a catalyst filter, the characteristics as a +WI Eat filter, and the filter characteristics regarding the particle size that is passed through yI. Therefore, the JQ composite filter 22 can have multiple filter functions that cannot be fulfilled by a single filtration 1 (1) in a compact configuration. , by using a hollow cylindrical jig having the same external shape as I#24 in place of the inner cylinder 3, and if desired, after reducing the fluidity of the binder bonded ceramic by heating etc. Furthermore, in the same manner as above, another binder-bonded ceramic layer for the filtration layer 24 is placed between the binder-bonded ceramic layer for the filtration layer 23 and the inner cylinder 3, and the combustible binder is burned off. be done.
第1図は本発明による好ましい一実施例の複合セラミッ
クフィルタの断面説明図、第2図は本発明による好まし
い別の一実施例の複合セラミックフィルタの断面説明図
である。
1.22・・・複合セラミックフィルタ。
2・・・外筒。
3・・・内筒。
4.23.24・・・濾過層。
第2図FIG. 1 is a cross-sectional explanatory view of a composite ceramic filter according to a preferred embodiment of the present invention, and FIG. 2 is a cross-sectional explanatory diagram of a composite ceramic filter according to another preferred embodiment of the present invention. 1.22...Composite ceramic filter. 2... Outer tube. 3...Inner cylinder. 4.23.24...filtration layer. Figure 2
Claims (5)
表面に外表面が支持され、セラミック製の多孔質の第二
有底筒状支持体の外表面に内表面が支持されるように第
一及び第二支持体の間に設けられたセラミック製の有底
筒状ろ過層を有する複合セラミックフィルタ。(1) The outer surface is supported on the inner surface of a first ceramic porous cylindrical support, and the inner surface is supported on the outer surface of a second ceramic porous cylindrical support. A composite ceramic filter having a ceramic bottomed cylindrical filtration layer provided between first and second supports so as to
求の範囲第1項に記載のフィルタ。(2) The filter according to claim 1, wherein the filtration layer consists of one substantially homogeneous layer.
の積層体からなる特許請求の範囲第1項又は第2項に記
載のフィルタ。(3) The filter according to claim 1 or 2, wherein the filtration layer is a laminate of two or more bottomed cylindrical layers having different filtration characteristics.
表面とセラミック製の多孔質の第二有底筒状支持体の外
表面との間に可燃性バインダで一体化したセラミック材
料粒状物を有底筒状に配する段階と、 第一及び第二支持体間にセラミック製ろ過 器を形成すべく可燃性バインダを焼失せしめる段階とを
有する複合セラミックフィルタの製造方法。(4) Ceramic integrated with a combustible binder between the inner surface of the first ceramic porous cylindrical support and the outer surface of the second ceramic porous cylindrical support. A method for manufacturing a composite ceramic filter, comprising the steps of: arranging material granules in a bottomed cylinder; and burning off a combustible binder to form a ceramic filter between first and second supports.
特許請求の範囲第4項に記載の方法。(5) The method of claim 4, wherein the ceramic material particles include combustible particles.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19451584A JPS6171815A (en) | 1984-09-17 | 1984-09-17 | Composite ceramic filter and preparation therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19451584A JPS6171815A (en) | 1984-09-17 | 1984-09-17 | Composite ceramic filter and preparation therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6171815A true JPS6171815A (en) | 1986-04-12 |
Family
ID=16325811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19451584A Pending JPS6171815A (en) | 1984-09-17 | 1984-09-17 | Composite ceramic filter and preparation therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6171815A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4807935B2 (en) * | 2001-12-29 | 2011-11-02 | ポール・コーポレーション | Filter element |
WO2016071972A1 (en) * | 2014-11-05 | 2016-05-12 | ギガフォトン株式会社 | Filter structure, target generation device, and method for manufacturing filter structure |
-
1984
- 1984-09-17 JP JP19451584A patent/JPS6171815A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4807935B2 (en) * | 2001-12-29 | 2011-11-02 | ポール・コーポレーション | Filter element |
WO2016071972A1 (en) * | 2014-11-05 | 2016-05-12 | ギガフォトン株式会社 | Filter structure, target generation device, and method for manufacturing filter structure |
JPWO2016071972A1 (en) * | 2014-11-05 | 2017-09-28 | ギガフォトン株式会社 | Filter structure, target generation device, and method of manufacturing filter structure |
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