JPS6171684A - Laser oscillator - Google Patents

Abstract

PURPOSE:To enable early detection of water leakage by a method wherein the increase in water amount due to water leakage of cooling water supply pipes and the like in a discharge gas container is detected by a dew-point sensor, thus driving an abnormal operation means. CONSTITUTION:Normally the dew point in a casing 10 is kept at -40--60 deg.C; however, when a very small amount of water leaks out of the joint of e.g. a high voltage electrode cooling water supply pipe 9, this water amount mixes in the laser gas, and the water amount of the laser gas increases more than a predetermined proper amount of water, resulting in a rapid decrease in the due point. At this time, the dew-point sensor 11 detects this phenomenon, and a control circuit 12 sets in action and releases abnormal alarm; thus, the abnormality due to water leakage can be early detected.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a laser oscillator that outputs laser light using a laser gas, and particularly to a laser oscillator that can detect an increase in the amount of water in a discharge gas storage container at an early stage. It is related to oscillators.

[Prior art]

FIG. 2 is a partially cutaway front view of a conventional six-axis orthogonal carbon dioxide laser oscillator, and FIG. 6 is a sectional view of this laser oscillator. In the figure, (1) is a pair of horizontally long high voltage electrodes facing each other vertically, (2) is a high voltage electrode (1), (1)
), and (3) is a pair of high voltage electrodes (3).

High voltage cables connected to (3), (4) are high voltage supply cable support terminals provided on each high voltage cable (3), and (5) are a pair of high voltage electrodes (1), (1).
(6) A pair of high-voltage electrodes (1), a total resonant mirror for resonance disposed at one end of (1), (7) a pair of high-voltage electrodes; (1), (1
), the partial reflector (8) is a cooling water supply pipe for the reflector, and the resonance reflector (6) and the partial reflector (
It is provided with a special power. (9) is a cooling water supply pipe for high voltage electrodes. 00 is a housing that is a gas storage container for discharge, and has a high pressure cage, a pole (1), and a high voltage cable (3).
), laser gas supply blower (5), total reflection mirror for resonance (6)
), partial reflection (71, contains the cooling water supply pipe for high and low voltage electrodes (9), the laser gas passage, etc., and completely seals the inside from the atmosphere to maintain an internal pressure of 50 to 100 Torr.
It is maintained at a certain level. REI NONOS uses CO2 at a predetermined concentration.
It flows along a path 1 shown by arrow a.

The conventional laser oscillator has a VC configuration as described above, and a high voltage is transmitted through a high voltage cable (3) to a pair of high voltage electric currents (1
), (1) and a discharge occurs, both electrodes (1).

The laser gas passing through the tIJ curve is excited in the discharge section (2), and the stimulated emission produces laser light.

The laser beam is amplified while repeatedly passing through the resonant total reflection mirror (6) and the partial reflection mirror (7), and is output from the partial reflection mirror (7) to the outside in the direction of the arrow (b).

The laser gas is excited by discharge in the discharge section (2) and its temperature increases. As the temperature of the laser gas increases,
CO2 in the laser gas is dissociated, the cO2m degree decreases, and the output of the laser beam decreases. For this reason, the laser gas is circulated by the laser gas supply blower (5), and the high voltage electrode cooling water supply pipe (9) is constantly cooled by cooling water, so that the output of the laser light does not decrease. There is.

[Problem that the invention seeks to solve]

In the conventional laser oscillator as described above, in case of water leakage from the joints of the high voltage electrode cooling water supply pipe (9) and the reflector cooling water supply pipe (8) in the integrated αQ, the housing α
Since Q was sealed, it was difficult to detect a small amount of water leaking. However, if a large amount of water accumulates in the housing due to water leakage, it is possible to quickly detect a short-circuit accident in the internal wiring caused by the water leakage and stop the laser oscillation using the control circuit. , or an increase in the amount of water leaking inside the housing? (The laser oscillator was protected by detecting the change in gas pressure with a pressure sensor and stopping the laser oscillation using a control circuit.

In this way, with conventional laser oscillators, it is possible to protect the laser oscillator to a certain extent if there is a large amount of water leakage, but early detection of a small amount of water leakage is difficult, and appropriate It is extremely difficult to take action;
The problem was that there were difficulties in maintenance and management.

This invention was made to solve this problem, and even if a small amount of water leaks in the discharge gas storage container, the leak can be detected early and appropriate measures such as stopping laser oscillation can be taken. The objective is to obtain a laser oscillator that is easy to maintain and manage, and can be used with peace of mind.

[Failure to solve the problem]

This invention V (this laser oscillator detects an increase in the amount of water in a discharge gas storage container housing a high voltage electrode, a resonant reflector, a partial reflector, a laser gas flow path, a cooling water supply pipe, etc.) The dew point sensor is configured to include a dew point sensor, abnormal operation means, and a control circuit that receives a detection signal from the dew point sensor and drives the abnormal operation means.

[Effect]

In the second aspect of the invention, an increase in water content due to water leakage in the discharge gas storage container is detected at the dew point sensor, and upon receiving a detection signal from the dew point sensor, the control circuit drives the abnormal operation means to detect an abnormality. The activation means can take appropriate measures such as issuing an abnormality alarm, stopping laser oscillation, or stopping the supply of cooling water.

〔Example〕

FIG. 1 is a partially cutaway front view showing one embodiment of the present invention. In this embodiment, the same configuration as the conventional example 011 is given the same reference numeral and the explanation thereof will be omitted, and only the control 0, which is different from the conventional example, will be explained. αυ is a dew point sensor that detects the moisture 1i: of the casing four times in the blood exsanguination gas storage container;
A detection section for the dew point above/αQ is provided so as to face the inside of the casing. qsu is an abnormality alarm device (
(not shown) is a control circuit that drives the dew point
It operates upon receiving a detection signal from.

In the laser oscillator having the V'LL configuration as described above, the h-point sensor αυ constantly monitors the dew point inside the housing qQ. The dew point inside the housing 00 is usually -40 to -60.
For example, if a very small amount of water leaks from the joint of the high-voltage electrode cooling water supply pipe (9), a very small amount of water may get mixed into the laser gas. , the moisture content of the laser gas increases with respect to the predetermined appropriate moisture @VC.

When the amount of water is mixed into the laser gas, the V will drop significantly. At this time, the dew point sensor (1
η detects this phenomenon, so even the smallest water leak can be detected.

When the control circuit receives the detection signal from the dew point sensor αυ detected in this way, the control circuit (c) operates to drive the abnormality alarm and issue an abnormality warning, indicating an abnormality due to water leakage. can be known at an early stage. The specific degree of water leakage is, for example, 'oozing'.In addition, abnormalities due to vLX water leakage can be detected early, so that water can enter the laser gas and cause intense absorption of laser light. This eliminates the need to continue machining work for a period of time when the output decreases, and it is also possible to stop the equipment and inspect it at an early stage.

In addition, in the above embodiment, an example of an alarm is shown as the abnormal activation means, but the abnormal activation means is not limited to this, and the abnormal activation means may be, for example, a circuit disconnection switch provided on the high voltage cable (4). . In this case, the control circuit (2
) to turn off the circuit cut-off switch by pulling the high voltage electrode (1).

(The supply of high voltage to 1 is turned off and the laser oscillation is stopped. Therefore, the exposed wiring causes a short circuit,
Damage accidents such as insulation breakdown will no longer occur.

Further, the abnormal operation means may be, for example, a solenoid valve provided at the cooling water supply port of the cooling water supply pipe (9) for the high voltage electrode e. In this case, the solenoid valve is driven to close by the jfill n circuit (6), and the supply of cooling water to the cooling water supply pipe (9) is stopped, thereby minimizing water leakage.

By the way, in the above explanation, the type of laser oscillator of the present invention is a 6-axis orthogonal type, in which the emitting electrode direction, the gas flow direction, and the laser beam oscillation direction intersect at right angles. As mentioned above, out of the 60,000 units of N''f, two are coaxial, biaxial orthogonal type, or six are coaxial, coaxial type ('L is also applicable, of course).

[Effect of original @)j]

As explained above, this invention is a gas storage for discharge '61.
6, the dew point sensor detects the increase in water content due to water leakage from the cooling water supply piping, etc., and detects the detected balance from the dew point sensor. 3:
>m! I died early due to the purchase of V to be able to pay attention to it.
t- If water leakage is detected, for example, an abnormality alarm will be issued and the device will be disposed of. Ruru is a cutting sword whose pickles are said to wart in their own way.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing an embodiment of the laser oscillator of the present invention, FIG. 2 is a sectional view of the first laser oscillator, and FIG. 6 is a sectional view of a conventional laser oscillator. . In the figure, (1) is a high voltage electrode, (6) is a reflector for It'i resonance, (7) is a partial reflector, (9) is a cooling water supply pipe for high voltage electrode, (10 is a housing (discharge gas storage container)
, αη is the dew point, and (6) is a control circuit. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (4)

[Claims] (1) In a laser oscillator that excites laser gas by discharge and outputs laser light by stimulated emission, the laser oscillator includes a high voltage electrode, a resonant reflector, a laser gas flow path, a cooling water supply pipe, etc. a dew point sensor capable of detecting an increase in moisture content in a discharge gas storage container containing a
A laser oscillator comprising: abnormal operation means; and a control circuit that receives a detection signal from the dew point sensor and drives the abnormal operation means. (2) The laser oscillator according to claim 1, wherein the abnormal operation means is driven by the control circuit and is a means for transmitting an abnormality alarm. (3) The laser oscillator according to claim 1, wherein the abnormal operation means is a means driven by the control circuit to stop laser oscillation. (4) The abnormal operation means is a means that is driven by the control circuit and stops the supply of cooling water to the cooling water supply pipe.
Laser oscillator described in section.