JPS6171201U - - Google Patents

Info

Publication number
JPS6171201U
JPS6171201U JP15642384U JP15642384U JPS6171201U JP S6171201 U JPS6171201 U JP S6171201U JP 15642384 U JP15642384 U JP 15642384U JP 15642384 U JP15642384 U JP 15642384U JP S6171201 U JPS6171201 U JP S6171201U
Authority
JP
Japan
Prior art keywords
organic solvent
workpiece
drying device
boiling point
steam bath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15642384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029354Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984156423U priority Critical patent/JPH029354Y2/ja
Publication of JPS6171201U publication Critical patent/JPS6171201U/ja
Application granted granted Critical
Publication of JPH029354Y2 publication Critical patent/JPH029354Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP1984156423U 1984-10-18 1984-10-18 Expired JPH029354Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984156423U JPH029354Y2 (enrdf_load_stackoverflow) 1984-10-18 1984-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984156423U JPH029354Y2 (enrdf_load_stackoverflow) 1984-10-18 1984-10-18

Publications (2)

Publication Number Publication Date
JPS6171201U true JPS6171201U (enrdf_load_stackoverflow) 1986-05-15
JPH029354Y2 JPH029354Y2 (enrdf_load_stackoverflow) 1990-03-07

Family

ID=30714427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984156423U Expired JPH029354Y2 (enrdf_load_stackoverflow) 1984-10-18 1984-10-18

Country Status (1)

Country Link
JP (1) JPH029354Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067811A (ja) * 2008-09-11 2010-03-25 Dainippon Screen Mfg Co Ltd 基板乾燥装置及び濃度算出方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067811A (ja) * 2008-09-11 2010-03-25 Dainippon Screen Mfg Co Ltd 基板乾燥装置及び濃度算出方法

Also Published As

Publication number Publication date
JPH029354Y2 (enrdf_load_stackoverflow) 1990-03-07

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