JPS6171201U - - Google Patents
Info
- Publication number
- JPS6171201U JPS6171201U JP15642384U JP15642384U JPS6171201U JP S6171201 U JPS6171201 U JP S6171201U JP 15642384 U JP15642384 U JP 15642384U JP 15642384 U JP15642384 U JP 15642384U JP S6171201 U JPS6171201 U JP S6171201U
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- workpiece
- drying device
- boiling point
- steam bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003960 organic solvent Substances 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000009835 boiling Methods 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984156423U JPH029354Y2 (de) | 1984-10-18 | 1984-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984156423U JPH029354Y2 (de) | 1984-10-18 | 1984-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6171201U true JPS6171201U (de) | 1986-05-15 |
| JPH029354Y2 JPH029354Y2 (de) | 1990-03-07 |
Family
ID=30714427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984156423U Expired JPH029354Y2 (de) | 1984-10-18 | 1984-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029354Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010067811A (ja) * | 2008-09-11 | 2010-03-25 | Dainippon Screen Mfg Co Ltd | 基板乾燥装置及び濃度算出方法 |
-
1984
- 1984-10-18 JP JP1984156423U patent/JPH029354Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010067811A (ja) * | 2008-09-11 | 2010-03-25 | Dainippon Screen Mfg Co Ltd | 基板乾燥装置及び濃度算出方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029354Y2 (de) | 1990-03-07 |